Masaki Uematsu

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Chigasaki, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma ashing apparatus
- Patent number 5,228,052
- Issue date Jul 13, 1993
- Nihon Shinku Gijutsu Kabushiki Kaisha
- Masashi Kikuchi
- H01 - BASIC ELECTRIC ELEMENTS