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Masaki Yamamoto
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Sendai-shi, JP
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last 30 patents
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Patent Grant
Optical element such as multilayer film reflection mirror, producti...
Patent number
7,474,733
Issue date
Jan 6, 2009
Nikon Corporation
Masaki Yamamoto
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Apparatus and methods for surficial milling of selected regions on...
Patent number
6,909,774
Issue date
Jun 21, 2005
Nikon Corporation
Tetsuya Oshino
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Multi-layered film reflector manufacturing method
Patent number
6,898,011
Issue date
May 24, 2005
Nikon Corporation
Noriaki Kandaka
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Patents Applications
last 30 patents
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Patent Application
Multi-layered film reflector manufacturing method
Publication number
20030147139
Publication date
Aug 7, 2003
Noriaki Kandaka
G02 - OPTICS
Information
Patent Application
Multilayer-film mirrors for use in extreme UV optical systems, and...
Publication number
20030081722
Publication date
May 1, 2003
NIKON CORPORATION
Noriaki Kandaka
G02 - OPTICS
Information
Patent Application
Apparatus and methods for surficial milling of selected regions on...
Publication number
20030058986
Publication date
Mar 27, 2003
NIKON CORPORATION
Tetsuya Oshino
B82 - NANO-TECHNOLOGY