Masami Akimoto

Person

Koshi-Machi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate cleaning apparatus and substrate cleaning method
- Patent number 12,131,919
- Issue date Oct 29, 2024
- Tokyo Electron Limited
- Tsunenaga Nakashima
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing apparatus with moving device for connecting an...
- Patent number 11,637,035
- Issue date Apr 25, 2023
- Tokyo Electron Limited
- Satoshi Morita
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus including periphery cover body
- Patent number 11,551,945
- Issue date Jan 10, 2023
- Tokyo Electron Limited
- Katsuhiro Morikawa
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,532,492
- Issue date Dec 20, 2022
- Tokyo Electron Limited
- Katsuhiro Morikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,510,284
- Issue date Nov 22, 2022
- Tokyo Electron Limited
- Satoshi Morita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,208,725
- Issue date Dec 28, 2021
- Tokyo Electron Limited
- Kouichi Mizunaga
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Liquid processing aparatus
- Patent number 9,953,852
- Issue date Apr 24, 2018
- Tokyo Electron Limited
- Jiro Higashijima
- B08 - CLEANING
Information Patent Grant
Substrate liquid processing apparatus
- Patent number 9,508,569
- Issue date Nov 29, 2016
- Tokyo Electron Limited
- Shigehisa Inoue
- B08 - CLEANING
Information Patent Grant
Coating/developing device and method
- Patent number 8,408,158
- Issue date Apr 2, 2013
- Tokyo Electron Limited
- Masami Akimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating and developing apparatus
- Patent number 8,302,556
- Issue date Nov 6, 2012
- Tokyo Electron Limited
- Masami Akimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid processing apparatus
- Patent number 7,998,308
- Issue date Aug 16, 2011
- Tokyo Electron Limited
- Satoshi Kaneko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid processing system
- Patent number 7,849,864
- Issue date Dec 14, 2010
- Tokyo Electron Limited
- Kazuhisa Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heating apparatus, heating method, coating apparatus, and storage m...
- Patent number 7,838,801
- Issue date Nov 23, 2010
- Tokyo Electron Limited
- Osamu Hirakawa
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Heating apparatus, and coating and developing apparatus
- Patent number 7,797,855
- Issue date Sep 21, 2010
- Tokyo Electron Limited
- Tetsuo Fukuoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating and developing apparatus
- Patent number 7,793,609
- Issue date Sep 14, 2010
- Tokyo Electron Limited
- Masami Akimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid processing apparatus
- Patent number 7,793,610
- Issue date Sep 14, 2010
- Tokyo Electron Limited
- Masami Akimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Developing treatment apparatus and developing treatment method
- Patent number 7,766,566
- Issue date Aug 3, 2010
- Tokyo Electron Limited
- Takahiro Kitano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heating device and heating method
- Patent number 7,758,340
- Issue date Jul 20, 2010
- Tokyo Electron Limited
- Masami Akimoto
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Coating and developing apparatus and coating and developing method
- Patent number 7,322,756
- Issue date Jan 29, 2008
- Tokyo Electron Limited
- Masami Akimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor manufacturing apparatus and method
- Patent number 7,287,920
- Issue date Oct 30, 2007
- Tokyo Electron Limited
- Shinichi Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating and developing system and coating and developing method
- Patent number 7,281,869
- Issue date Oct 16, 2007
- Tokyo Electron Limited
- Masami Akimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating and developing system and coating and developing method
- Patent number 7,267,497
- Issue date Sep 11, 2007
- Tokyo Electron Limited
- Masami Akimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating and developing system and coating and developing method wit...
- Patent number 7,245,348
- Issue date Jul 17, 2007
- Tokyo Electron Limited
- Masami Akimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating and developing system and coating and developing method
- Patent number 7,241,061
- Issue date Jul 10, 2007
- Tokyo Electron Limited
- Masami Akimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating film forming apparatus and coating unit
- Patent number 7,087,118
- Issue date Aug 8, 2006
- Tokyo Electron Limited
- Takahiro Kitano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 7,011,863
- Issue date Mar 14, 2006
- Tokyo Electron Limited
- Masami Akimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating film forming apparatus and coating unit
- Patent number 6,936,107
- Issue date Aug 30, 2005
- Tokyo Electron Limited
- Takahiro Kitano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film forming unit
- Patent number 6,872,256
- Issue date Mar 29, 2005
- Tokyo Electron Limited
- Takahiro Kitano
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Coating film forming apparatus and coating film forming method
- Patent number 6,716,478
- Issue date Apr 6, 2004
- Tokyo Electron Limited
- Takahiro Kitano
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Coating film forming apparatus and coating unit
- Patent number 6,676,757
- Issue date Jan 13, 2004
- Tokyo Electron Limited
- Takahiro Kitano
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLATING APPARATUS
- Publication number 20230096305
- Publication date Mar 30, 2023
- TOKYO ELECTRON LIMITED
- Masato Hamada
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
PLATING METHOD AND PLATING APPARATUS
- Publication number 20230042744
- Publication date Feb 9, 2023
- TOKYO ELECTRON LIMITED
- Masato Hamada
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD
- Publication number 20220399210
- Publication date Dec 15, 2022
- TOKYO ELECTRON LIMITED
- Tsunenaga Nakashima
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD
- Publication number 20220389574
- Publication date Dec 8, 2022
- TOKYO ELECTRON LIMITED
- Tsunenaga Nakashima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20220154342
- Publication date May 19, 2022
- TOKYO ELECTRON LIMITED
- Katsuhiro Morikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220130691
- Publication date Apr 28, 2022
- TOKYO ELECTRON LIMITED
- Kouzou TACHIBANA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20220056590
- Publication date Feb 24, 2022
- TOKYO ELECTRON LIMITED
- Satoshi Morita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20200312678
- Publication date Oct 1, 2020
- TOKYO ELECTRON LIMITED
- Katsuhiro Morikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20200105550
- Publication date Apr 2, 2020
- TOKYO ELECTRON LIMITED
- Katsuhiro Morikawa
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20200105574
- Publication date Apr 2, 2020
- TOKYO ELECTRON LIMITED
- Satoshi Morita
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20200107404
- Publication date Apr 2, 2020
- TOKYO ELECTRON LIMITED
- Satoshi Morita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20200102654
- Publication date Apr 2, 2020
- TOKYO ELECTRON LIMITED
- Kouichi Mizunaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS
- Publication number 20160118275
- Publication date Apr 28, 2016
- TOKYO ELECTRON LIMITED
- Shigehisa Inoue
- B08 - CLEANING
Information Patent Application
LIQUID PROCESSING APPARATUS
- Publication number 20150114561
- Publication date Apr 30, 2015
- TOKYO ELECTRON LIMITED
- Jiro HIGASHIJIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING AND DEVELOPING APPARATUS
- Publication number 20100326353
- Publication date Dec 30, 2010
- TOKYO ELECTRON LIMITED
- Masami Akimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING AND DEVELOPING APPARATUS
- Publication number 20100300353
- Publication date Dec 2, 2010
- TOKYO ELECTRON LIMITED
- Masami Akimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Liquid processing system
- Publication number 20080023049
- Publication date Jan 31, 2008
- TOKYO ELECTRON LIMITED
- Kazuhisa Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Liquid processing apparatus
- Publication number 20070240638
- Publication date Oct 18, 2007
- TOKYO ELECTRON LIMITED
- Masami Akimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Liquid processing apparatus
- Publication number 20070240824
- Publication date Oct 18, 2007
- TOKYO ELECTRON LIMITED
- Satoshi Kaneko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Heating apparatus, heating method, coating apparatus, and storage m...
- Publication number 20070194005
- Publication date Aug 23, 2007
- TOKYO ELECTRON LIMITED
- Osamu Hirakawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATING DEVICE AND HEATING METHOD
- Publication number 20070160947
- Publication date Jul 12, 2007
- TOKYO ELECTRON LIMITED
- Masami AKIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Coating and developing apparatus
- Publication number 20070056514
- Publication date Mar 15, 2007
- TOKYO ELECTRON LIMITED
- Masami Akimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Heating apparatus, and coating and developing apparatus
- Publication number 20070048979
- Publication date Mar 1, 2007
- TOKYO ELECTRON LIMITED
- Tetsuo Fukuoka
- C30 - CRYSTAL GROWTH
Information Patent Application
Developing treatment apparatus and developing treatment method
- Publication number 20070031145
- Publication date Feb 8, 2007
- TOKYO ELECTRON LIMITED
- Takahiro Kitano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING/DEVELOPING DEVICE AND METHOD
- Publication number 20060201423
- Publication date Sep 14, 2006
- TOKYO ELECTRON LIMITED
- Masami Akimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Semiconductor manufacturing apparatus and method
- Publication number 20060194445
- Publication date Aug 31, 2006
- TOKYO ELECTRON LIMITED
- Shinichi Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Coating and developing apparatus and coating and developing method
- Publication number 20060165408
- Publication date Jul 27, 2006
- TOKYO ELECTRON LIMITED
- Masami Akimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Coating and developing system and coating and developing method
- Publication number 20060165409
- Publication date Jul 27, 2006
- TOKYO ELECTRON LIMITED
- Masami Akimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Coating and developing system and coating and developing method
- Publication number 20060164613
- Publication date Jul 27, 2006
- TOKYO ELECTRON LIMITED
- Masami Akimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Coating and developing system and coating and developing method
- Publication number 20060162646
- Publication date Jul 27, 2006
- TOKYO ELECTRON LIMITED
- Masami Akimoto
- H01 - BASIC ELECTRIC ELEMENTS

Masami Akimoto

Person

Patents Grantslast 30 patents

Substrate cleaning apparatus and substrate cleaning method

Substrate processing apparatus with moving device for connecting an...

Substrate processing apparatus including periphery cover body

Substrate processing apparatus and substrate processing method

Substrate processing apparatus

Substrate processing apparatus

Liquid processing aparatus

Substrate liquid processing apparatus

Coating/developing device and method

Coating and developing apparatus

Liquid processing apparatus

Liquid processing system

Heating apparatus, heating method, coating apparatus, and storage m...

Heating apparatus, and coating and developing apparatus

Coating and developing apparatus

Liquid processing apparatus

Developing treatment apparatus and developing treatment method

Heating device and heating method

Coating and developing apparatus and coating and developing method

Semiconductor manufacturing apparatus and method

Coating and developing system and coating and developing method

Coating and developing system and coating and developing method

Coating and developing system and coating and developing method wit...

Coating and developing system and coating and developing method

Coating film forming apparatus and coating unit

Substrate processing apparatus and substrate processing method

Coating film forming apparatus and coating unit

Film forming unit

Coating film forming apparatus and coating film forming method

Coating film forming apparatus and coating unit

Patents Applicationslast 30 patents

PLATING APPARATUS

PLATING METHOD AND PLATING APPARATUS

SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD

SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE LIQUID PROCESSING APPARATUS

LIQUID PROCESSING APPARATUS

COATING AND DEVELOPING APPARATUS

COATING AND DEVELOPING APPARATUS

Liquid processing system

Liquid processing apparatus

Liquid processing apparatus

Heating apparatus, heating method, coating apparatus, and storage m...

HEATING DEVICE AND HEATING METHOD

Coating and developing apparatus

Heating apparatus, and coating and developing apparatus

Developing treatment apparatus and developing treatment method

COATING/DEVELOPING DEVICE AND METHOD

Semiconductor manufacturing apparatus and method

Coating and developing apparatus and coating and developing method

Coating and developing system and coating and developing method

Coating and developing system and coating and developing method

Coating and developing system and coating and developing method