Masami Hasegawa

Person

  • Kunitachi-shi, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma treatment apparatus

    • Patent number 9,844,126
    • Issue date Dec 12, 2017
    • Canon Aneiva Corporation
    • Masayoshi Ikeda
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Processing apparatus

    • Patent number 9,603,231
    • Issue date Mar 21, 2017
    • Canon Anelva Corporation
    • Tomoaki Osada
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS

    • Publication number 20140020833
    • Publication date Jan 23, 2014
    • Canon ANELVA Corporation
    • Tatsuhiko Yoshida
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PROCESSING APPARATUS

    • Publication number 20140014269
    • Publication date Jan 16, 2014
    • Canon ANELVA Corporation
    • Tomoaki Osada
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA TREATMENT APPARATUS

    • Publication number 20120298303
    • Publication date Nov 29, 2012
    • Canon ANELVA Corporation
    • Masayoshi IKEDA
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    SUBSTRATE ALIGNMENT APPARATUS AND SUBSTRATE PROCESSING APPARATUS

    • Publication number 20100024723
    • Publication date Feb 4, 2010
    • CANON ANELVAN CORPORATION
    • Masami Hasegawa
    • H01 - BASIC ELECTRIC ELEMENTS