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Masami Kamibayashi

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  • Kokubunji, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma etching method
    • Patent number 10,418,224
    • Issue date Sep 17, 2019
    • Hitachi High-Technologies Corporation
    • Naoyuki Kofuji
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma etching method
    • Patent number 9,960,014
    • Issue date May 1, 2018
    • Hitachi High-Technologies Corporation
    • Naoyuki Kofuji
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    PLASMA ETCHING METHOD
    • Publication number 20180233329
    • Publication date Aug 16, 2018
    • Hitachi High-Technologies Corporation
    • Naoyuki KOFUJI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA ETCHING METHOD
    • Publication number 20170084430
    • Publication date Mar 23, 2017
    • Hitachi High-Technologies Corporation
    • Naoyuki Kofuji
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA ETCHING APPARATUS
    • Publication number 20130087285
    • Publication date Apr 11, 2013
    • Hitachi High-Technologies Corporation
    • Naoyuki Kofuji
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS USING TRANSMISSION ELECTRODE
    • Publication number 20110253313
    • Publication date Oct 20, 2011
    • Hitachi High-Technologies Corporation
    • Keizo SUZUKI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
    • Publication number 20110253672
    • Publication date Oct 20, 2011
    • Hitachi High-Technologies Corporation
    • Masami Kamibayashi
    • H01 - BASIC ELECTRIC ELEMENTS