Masami Kubota

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Nakakoma, JP

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Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck
- Patent number 5,625,526
- Issue date Apr 29, 1997
- Tokyo Electron Limited
- Masahide Watanabe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Plasma processing apparatus comprising means for generating rotatin...
- Patent number 5,440,206
- Issue date Aug 8, 1995
- Tokyo Electron Ltd.
- Yoichi Kurono
- H01 - BASIC ELECTRIC ELEMENTS