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Masami Ohta
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Shiga, JP
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Patents Grants
last 30 patents
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Patent Grant
Polishing pad, and method and apparatus for polishing
Patent number
6,953,388
Issue date
Oct 11, 2005
Toray Industries, Inc.
Masaaki Shimagaki
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
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Patent Application
Polishing pad, and method and apparatus for polishing
Publication number
20030003857
Publication date
Jan 2, 2003
Masaaki Shimagaki
B24 - GRINDING POLISHING