Masami Ohtani

Person

Kyoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Multi-channel developer system
- Patent number 8,127,713
- Issue date Mar 6, 2012
- Sokudo Co., Ltd.
- Eric B. Britcher
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate processing apparatus with integrated cleaning unit
- Patent number 8,031,324
- Issue date Oct 4, 2011
- Sokudo Co., Ltd.
- Yoshiteru Fukutomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 6,896,466
- Issue date May 24, 2005
- Dainippon Screen Mfg. Co, Ltd.
- Joichi Nishimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 6,790,286
- Issue date Sep 14, 2004
- Dainippon Screen Mfg. Co. Ltd.
- Joichi Nishimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate inspection method and sub...
- Patent number 6,790,287
- Issue date Sep 14, 2004
- Dainippon Screen Mfg. Co. Ltd.
- Masayoshi Shiga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Robot
- Patent number 6,688,189
- Issue date Feb 10, 2004
- Kawasaki Jukogyo Kabushiki Kaisha
- Yasuhiko Hashimoto
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Substrate processing apparatus
- Patent number 6,371,713
- Issue date Apr 16, 2002
- Dainippon Screen Mfg. Co., Ltd.
- Joichi Nishimura
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate cleaning apparatus and method
- Patent number 6,286,525
- Issue date Sep 11, 2001
- Dainippon Screen Mfg. Co.
- Joichi Nishimura
- B08 - CLEANING
Information Patent Grant
Substrate cleaning apparatus and method
- Patent number 6,260,562
- Issue date Jul 17, 2001
- Dainippon Screen Mfg. Co., Ltd.
- Kenya Morinishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus
- Patent number 6,159,291
- Issue date Dec 12, 2000
- Dainippon Screen Mfg. Co., Ltd.
- Akihiko Morita
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method of and apparatus for cleaning substrate
- Patent number 6,151,744
- Issue date Nov 28, 2000
- Dainippon Screen Mfg. Co., Ltd.
- Masami Ohtani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for processing a substrate providing an efficient arrange...
- Patent number 6,099,643
- Issue date Aug 8, 2000
- Dainippon Screen Mfg. Co., Ltd.
- Masami Ohtani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate heat-treating apparatus
- Patent number 6,062,852
- Issue date May 16, 2000
- Dainippon Screen Mfg. Co., Ltd.
- Takanori Kawamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus having regulated power consumption a...
- Patent number 6,060,697
- Issue date May 9, 2000
- Dainippon Screen Mfg. Co., Ltd.
- Akihiko Morita
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate processing apparatus, substrate transport apparatus and s...
- Patent number 6,051,101
- Issue date Apr 18, 2000
- Dainippon Screen Mfg. Co., Ltd.
- Masami Ohtani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 6,048,400
- Issue date Apr 11, 2000
- Dainippon Screen Mfg. Co., Ltd.
- Masami Ohtani
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Substrate processing apparatus
- Patent number 6,007,629
- Issue date Dec 28, 1999
- Dainippon Screen Mfg. Co., Ltd.
- Masami Ohtani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for substrate holding
- Patent number 5,989,342
- Issue date Nov 23, 1999
- Dainippon Screen Mfg, Co., Ltd.
- Masahide Ikeda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus
- Patent number 5,963,753
- Issue date Oct 5, 1999
- Dainippon Screen Mfg. Co., Ltd.
- Masami Ohtani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate container cassette, interface mechanism, and substrate pr...
- Patent number 5,841,515
- Issue date Nov 24, 1998
- Dainippon Screen Mfg. Co., Ltd.
- Masami Ohtani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate spin cleaning apparatus
- Patent number 5,829,087
- Issue date Nov 3, 1998
- Dainippon Screen Mfg. Co., Ltd.
- Joichi Nishimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate spin cleaning apparatus
- Patent number 5,785,068
- Issue date Jul 28, 1998
- Dainippon Screen Mfg. Co., Ltd.
- Tadashi Sasaki
- B08 - CLEANING
Information Patent Grant
Treating solution supplying method and substrate treating apparatus
- Patent number 5,765,072
- Issue date Jun 9, 1998
- Dainippon Screen Mfg. Co. Ltd.
- Masami Ohtani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for cleaning substrates and methods for attaching/detachi...
- Patent number 5,647,083
- Issue date Jul 15, 1997
- Dainippon Screen Mfg. Co., Ltd.
- Kenji Sugimoto
- B08 - CLEANING
Information Patent Grant
Treating liquid supplying apparatus for a substrate spin treating a...
- Patent number 5,514,215
- Issue date May 7, 1996
- Dainippon Screen Mfg. Co., Ltd.
- Kazuhisa Takamatsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate transport apparatus
- Patent number 5,359,785
- Issue date Nov 1, 1994
- Dainippon Screen Mfg. Co., Ltd.
- Yoshiteru Fukutomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate holding apparatus of a simple structure for holding a rot...
- Patent number 5,322,079
- Issue date Jun 21, 1994
- Dainippon Screen Mfg. Co., Ltd.
- Yoshiteru Fukutomi
- B08 - CLEANING
Information Patent Grant
Interface apparatus for transporting substrates between substrate p...
- Patent number 5,308,210
- Issue date May 3, 1994
- Dainippon Screen Mfg. Co., Ltd.
- Masami Ohtani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning apparatus having a contact buffer apparatus
- Patent number 4,935,981
- Issue date Jun 26, 1990
- Dainippon Screen Mfg. Co., Ltd.
- Masami Ohtani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer transfer apparatus having an improved wafer transfer portion
- Patent number 4,923,054
- Issue date May 8, 1990
- Dainippon Screen Mfg. Co., Ltd.
- Masami Ohtani
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20090014126
- Publication date Jan 15, 2009
- Sokudo Co., Ltd.
- Masami Ohtani
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS WITH HIGH THROUGHPUT DEVELOPMENT UNITS
- Publication number 20080212049
- Publication date Sep 4, 2008
- Sokudo Co., Ltd.
- Yoshiteru Fukutomi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS INCLUDING A SUBSTRATE REVERSING REGION
- Publication number 20080196658
- Publication date Aug 21, 2008
- Sokudo Co., Ltd.
- Yoshiteru Fukutomi
- G11 - INFORMATION STORAGE
Information Patent Application
SUBSTRATE PROCESSING APPARATUS WITH INTEGRATED CLEANING UNIT
- Publication number 20080198341
- Publication date Aug 21, 2008
- Sokudo Co., Ltd.
- Yoshiteru Fukutomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20050204196
- Publication date Sep 15, 2005
- Joichi Nishimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus
- Publication number 20030164181
- Publication date Sep 4, 2003
- Dainippon Screen Mfg. Co., Ltd.
- Masami Ohtani
- B08 - CLEANING
Information Patent Application
Substrate processing apparatus, substrate inspection method and sub...
- Publication number 20020189758
- Publication date Dec 19, 2002
- Dainippon Screen Mfg. Co., Ltd.
- Masayoshi Shiga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus
- Publication number 20020106269
- Publication date Aug 8, 2002
- Dainippon Screen Mfg. Co., Ltd.
- Joichi Nishimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus
- Publication number 20020092368
- Publication date Jul 18, 2002
- Dainippon Screen Mfg. Co., Ltd.
- Joichi Nishimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Robot
- Publication number 20010035065
- Publication date Nov 1, 2001
- Yasuhiko Hashimoto
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...

Masami Ohtani

Person

Patents Grantslast 30 patents

Multi-channel developer system

Substrate processing apparatus with integrated cleaning unit

Substrate processing apparatus

Substrate processing apparatus

Substrate processing apparatus, substrate inspection method and sub...

Robot

Substrate processing apparatus

Substrate cleaning apparatus and method

Substrate cleaning apparatus and method

Substrate treating apparatus

Method of and apparatus for cleaning substrate

Apparatus for processing a substrate providing an efficient arrange...

Substrate heat-treating apparatus

Substrate processing apparatus having regulated power consumption a...

Substrate processing apparatus, substrate transport apparatus and s...

Substrate processing apparatus

Substrate processing apparatus

Apparatus for substrate holding

Substrate processing apparatus

Substrate container cassette, interface mechanism, and substrate pr...

Substrate spin cleaning apparatus

Substrate spin cleaning apparatus

Treating solution supplying method and substrate treating apparatus

Apparatus for cleaning substrates and methods for attaching/detachi...

Treating liquid supplying apparatus for a substrate spin treating a...

Substrate transport apparatus

Substrate holding apparatus of a simple structure for holding a rot...

Interface apparatus for transporting substrates between substrate p...

Cleaning apparatus having a contact buffer apparatus

Wafer transfer apparatus having an improved wafer transfer portion

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS WITH HIGH THROUGHPUT DEVELOPMENT UNITS

SUBSTRATE PROCESSING APPARATUS INCLUDING A SUBSTRATE REVERSING REGION

SUBSTRATE PROCESSING APPARATUS WITH INTEGRATED CLEANING UNIT

Substrate processing apparatus and substrate processing method

Substrate processing apparatus

Substrate processing apparatus, substrate inspection method and sub...

Substrate processing apparatus

Substrate processing apparatus

Robot