Masami Otani

Follow

Person

Kyoto-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and method including obstacle detection
- Patent number 7,231,273
- Issue date Jun 12, 2007
- Dainippon Screen Mfg. Co., Ltd.
- Joichi Nishimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer transferring device
- Patent number 4,846,623
- Issue date Jul 11, 1989
- Dainippon Screen Mfg. Co., Ltd.
- Masami Otani
- B28 - WORKING CEMENT, CLAY, OR STONE

Patents Applicationslast 30 patents

Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20050123386
- Publication date Jun 9, 2005
- Dainippon Screen Mfg. Co., Ltd.
- Joichi Nishimura
- H01 - BASIC ELECTRIC ELEMENTS