Masami Shibagaki

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Etching apparatus
- Patent number 11,195,700
- Issue date Dec 7, 2021
- Canon Anelva Corporation
- Hidekazu Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment method and heat treatment apparatus for semiconducto...
- Patent number 9,991,119
- Issue date Jun 5, 2018
- Canon Anelva Corporation
- Masami Shibagaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate heat treatment apparatus
- Patent number 9,603,195
- Issue date Mar 21, 2017
- Canon Anelva Corporation
- Kaori Mashimo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature control method for substrate heat treatment apparatus,...
- Patent number 9,431,281
- Issue date Aug 30, 2016
- Canon Anelva Corporation
- Masami Shibagaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment apparatus and semiconductor device manufacturing method
- Patent number 9,147,742
- Issue date Sep 29, 2015
- Canon Anelva Corporation
- Hiroshi Doi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate heat treating apparatus, temperature control method of su...
- Patent number 8,691,676
- Issue date Apr 8, 2014
- Canon Anelva Corporation
- Masami Shibagaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate annealing method, and sem...
- Patent number 8,426,323
- Issue date Apr 23, 2013
- Canon Anelva Corporation
- Nobuyuki Masaki
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Annealing method for semiconductor device with silicon carbide subs...
- Patent number 8,198,182
- Issue date Jun 12, 2012
- Canon Anelva Corporation
- Masami Shibagaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and method of manufacturing crystalline...
- Patent number 8,187,958
- Issue date May 29, 2012
- Canon Anelva Corporation
- Masami Shibagaki
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Heating process apparatus
- Patent number 8,150,243
- Issue date Apr 3, 2012
- Canon Anelva Corporation
- Akira Kumagai
- G01 - MEASURING TESTING
Information Patent Grant
Substrate supporting/transferring tray
- Patent number 8,147,242
- Issue date Apr 3, 2012
- Canon Anelva Corporation
- Masami Shibagaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum heating apparatus
- Patent number 8,129,663
- Issue date Mar 6, 2012
- Canon Anelva Corporation
- Nobuyuki Masaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for heat-treating substrate and method for heat-treating...
- Patent number 8,090,245
- Issue date Jan 3, 2012
- Canon Anelva Corporation
- Masami Shibagaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heating apparatus, heating method, and semiconductor device manufac...
- Patent number 8,032,015
- Issue date Oct 4, 2011
- Canon Anelva Corporation
- Masami Shibagaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate heating apparatus, heating method, and semiconductor devi...
- Patent number 7,897,523
- Issue date Mar 1, 2011
- Canon Anelva Engineering Corporation
- Masami Shibagaki
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Substrate heating apparatus and semiconductor fabrication method
- Patent number 7,807,553
- Issue date Oct 5, 2010
- Canon Anelva Corporation
- Masami Shibagaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate supporting/transferring tray
- Patent number 7,780,440
- Issue date Aug 24, 2010
- Canon Anelva Corporation
- Masami Shibagaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate heat treatment apparatus and substrate transfer tray used...
- Patent number 7,732,739
- Issue date Jun 8, 2010
- Canon Anelva Corporation
- Masami Shibagaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming a copper thin film
- Patent number 6,887,522
- Issue date May 3, 2005
- Anelva Corporation
- Atsushi Sekiguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Etching method
- Patent number 4,885,054
- Issue date Dec 5, 1989
- Anelva Corporation
- Masami Shibagaki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
HEAT TREATMENT METHOD AND HEAT TREATMENT APPARATUS FOR SEMICONDUCTO...
- Publication number 20170011921
- Publication date Jan 12, 2017
- Canon ANELVA Corporation
- MASAMI SHIBAGAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING APPARATUS
- Publication number 20140338836
- Publication date Nov 20, 2014
- Canon ANELVA Corporation
- Hidekazu SUZUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HEAT TREATMENT APPARATUS
- Publication number 20140308028
- Publication date Oct 16, 2014
- Canon ANELVA Corporation
- Kaori Mashimo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HEAT TREATING APPARATUS, TEMPERATURE CONTROL METHOD OF SU...
- Publication number 20130109109
- Publication date May 2, 2013
- Canon ANELVA Corporation
- Masami Shibagaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CONTROL METHOD FOR SUBSTRATE HEAT TREATMENT APPARATUS,...
- Publication number 20120219921
- Publication date Aug 30, 2012
- Canon ANELVA Corporation
- Masami Shibagaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND METHOD OF MANUFACTURING CRYSTALLINE...
- Publication number 20120070968
- Publication date Mar 22, 2012
- Canon ANELVA Corporation
- Masami Shibagaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANNEALING METHOD FOR SEMICONDUCTOR DEVICE WITH SILICON CARBIDE SUBS...
- Publication number 20110121317
- Publication date May 26, 2011
- Canon ANELVA Corporation
- Masami Shibagaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT TREATMENT APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
- Publication number 20110117753
- Publication date May 19, 2011
- Canon ANELVA Corporation
- Hiroshi Doi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CONTROL METHOD FOR HEATING APPARATUS
- Publication number 20100243618
- Publication date Sep 30, 2010
- Canon ANELVA Corporation
- Masami Shibagaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR HEAT-TREATING SUBSTRATE AND SUBSTRATE MANUFACTURING M...
- Publication number 20100226630
- Publication date Sep 9, 2010
- Canon ANELVA Corporation
- Masami Shibagaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE ANNEALING METHOD, AND SEM...
- Publication number 20100151695
- Publication date Jun 17, 2010
- Canon ANELVA Corporation
- Nobuyuki Masaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATING PROCESS APPARATUS
- Publication number 20100111512
- Publication date May 6, 2010
- Canon ANELVA Corporation
- Akira Kumagai
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE SUPPORTING/TRANSFERRING TRAY
- Publication number 20100084392
- Publication date Apr 8, 2010
- Canon ANELVA Corporation
- Masami Shibagaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANNEALING METHOD FOR SEMICONDUCTOR DEVICE WITH SILICON CARBIDE SUBS...
- Publication number 20100025695
- Publication date Feb 4, 2010
- CANON ANELVA CORPORATION
- Masami Shibagaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM HEATING APPARATUS
- Publication number 20090321412
- Publication date Dec 31, 2009
- Canon ANELVA Corporation
- Nobuyuki Masaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HEATING APPARATUS, SEMICONDUCTOR DEVICE MANUFACTURING MET...
- Publication number 20090218579
- Publication date Sep 3, 2009
- CANON ANELVA ENGINEERING CORPORATION
- Masami Shibagaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATING APPARATUS, HEATING METHOD, AND SEMICONDUCTOR DEVICE MANUFCA...
- Publication number 20090202231
- Publication date Aug 13, 2009
- CANON ANELVA ENGINEERING CORPORATION
- Masami Shibagaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR HEAT-TREATING SUBSTRATE AND METHOD FOR HEAT-TREATING...
- Publication number 20090190908
- Publication date Jul 30, 2009
- Canon ANELVA Corporation
- Masami Shibagaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Heating Apparatus, Heating Method, and Semiconductor Devi...
- Publication number 20090191724
- Publication date Jul 30, 2009
- CANON ANELVA ENGINEERING CORPORATION
- Masami Shibagaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HEATING APPARATUS AND SEMICONDUCTOR FABRICATION METHOD
- Publication number 20080213988
- Publication date Sep 4, 2008
- Canon ANELVA Corporation
- Masami Shibagaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Supporting/Transferring Tray
- Publication number 20080128969
- Publication date Jun 5, 2008
- Canon ANELVA Corporation
- Masami Shibagaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Heat Treatment Apparatus And Substrate Transfer Tray Used...
- Publication number 20070194001
- Publication date Aug 23, 2007
- Canon ANELVA Corporation
- Masami Shibagaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for forming a copper thin film
- Publication number 20020157610
- Publication date Oct 31, 2002
- Atsushi Sekiguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Masami Shibagaki

Person

Patents Grantslast 30 patents

Etching apparatus

Heat treatment method and heat treatment apparatus for semiconducto...

Substrate heat treatment apparatus

Temperature control method for substrate heat treatment apparatus,...

Heat treatment apparatus and semiconductor device manufacturing method

Substrate heat treating apparatus, temperature control method of su...

Substrate processing apparatus, substrate annealing method, and sem...

Annealing method for semiconductor device with silicon carbide subs...

Substrate processing method and method of manufacturing crystalline...

Heating process apparatus

Substrate supporting/transferring tray

Vacuum heating apparatus

Apparatus for heat-treating substrate and method for heat-treating...

Heating apparatus, heating method, and semiconductor device manufac...

Substrate heating apparatus, heating method, and semiconductor devi...

Substrate heating apparatus and semiconductor fabrication method

Substrate supporting/transferring tray

Substrate heat treatment apparatus and substrate transfer tray used...

Method for forming a copper thin film

Etching method

Patents Applicationslast 30 patents

HEAT TREATMENT METHOD AND HEAT TREATMENT APPARATUS FOR SEMICONDUCTO...

ETCHING APPARATUS

SUBSTRATE HEAT TREATMENT APPARATUS

SUBSTRATE HEAT TREATING APPARATUS, TEMPERATURE CONTROL METHOD OF SU...

TEMPERATURE CONTROL METHOD FOR SUBSTRATE HEAT TREATMENT APPARATUS,...

SUBSTRATE PROCESSING METHOD AND METHOD OF MANUFACTURING CRYSTALLINE...

ANNEALING METHOD FOR SEMICONDUCTOR DEVICE WITH SILICON CARBIDE SUBS...

HEAT TREATMENT APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD

TEMPERATURE CONTROL METHOD FOR HEATING APPARATUS

APPARATUS FOR HEAT-TREATING SUBSTRATE AND SUBSTRATE MANUFACTURING M...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE ANNEALING METHOD, AND SEM...

HEATING PROCESS APPARATUS

SUBSTRATE SUPPORTING/TRANSFERRING TRAY

ANNEALING METHOD FOR SEMICONDUCTOR DEVICE WITH SILICON CARBIDE SUBS...

VACUUM HEATING APPARATUS

SUBSTRATE HEATING APPARATUS, SEMICONDUCTOR DEVICE MANUFACTURING MET...

HEATING APPARATUS, HEATING METHOD, AND SEMICONDUCTOR DEVICE MANUFCA...

APPARATUS FOR HEAT-TREATING SUBSTRATE AND METHOD FOR HEAT-TREATING...

Substrate Heating Apparatus, Heating Method, and Semiconductor Devi...

SUBSTRATE HEATING APPARATUS AND SEMICONDUCTOR FABRICATION METHOD

Substrate Supporting/Transferring Tray

Substrate Heat Treatment Apparatus And Substrate Transfer Tray Used...

Method for forming a copper thin film