TREA

Masami SUDAYAMA

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  • Miyagi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 10,504,698
    • Issue date Dec 10, 2019
    • Tokyo Electron Limited
    • Masayuki Kohno
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20160118224
    • Publication date Apr 28, 2016
    • TOKYO ELECTRON LIMITED
    • Masayuki KOHNO
    • H01 - BASIC ELECTRIC ELEMENTS