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Masami Yamashita
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Koshi-City, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
11,594,427
Issue date
Feb 28, 2023
Tokyo Electron Limited
Toru Ihara
B08 - CLEANING
Information
Patent Grant
Substrate cleaning apparatus, substrate cleaning system, substrate...
Patent number
10,998,183
Issue date
May 4, 2021
Tokyo Electron Limited
Miyako Kaneko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Liquid processing method, substrate processing apparatus, and stora...
Patent number
10,867,814
Issue date
Dec 15, 2020
Tokyo Electron Limited
Yosuke Kawabuchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing system, substrate cleaning method, and recordi...
Patent number
10,792,711
Issue date
Oct 6, 2020
Tokyo Electron Limited
Meitoku Aibara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing system, substrate cleaning method, and recordi...
Patent number
10,272,478
Issue date
Apr 30, 2019
Tokyo Electron Limited
Meitoku Aibara
B08 - CLEANING
Information
Patent Grant
Method of treating a microelectronic substrate using dilute TMAH
Patent number
10,256,163
Issue date
Apr 9, 2019
Tokyo Electron Limited
Wallace P. Printz
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Substrate cleaning method and recording medium
Patent number
9,818,598
Issue date
Nov 14, 2017
Tokyo Electron Limited
Meitoku Aibara
B08 - CLEANING
Information
Patent Grant
Multimedia-type contents reproduction device and reproduction metho...
Patent number
8,260,712
Issue date
Sep 4, 2012
Panasonic Corporation
Masaya Yamamoto
G11 - INFORMATION STORAGE
Information
Patent Grant
Heat treatment apparatus, heat treatment method, and recording medi...
Patent number
7,947,215
Issue date
May 24, 2011
Tokyo Electron Limited
Hikaru Ito
C21 - METALLURGY OF IRON
Information
Patent Grant
Heat treatment apparatus, heat treatment method, and recording medi...
Patent number
7,745,347
Issue date
Jun 29, 2010
Tokyo Electron Limited
Hikaru Ito
C21 - METALLURGY OF IRON
Information
Patent Grant
Method of controlling substrate processing apparatus and substrate...
Patent number
7,529,595
Issue date
May 5, 2009
Tokyo Electron Limited
Shinichi Shinozuka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Data delivery method and data delivery system using sets of passkey...
Patent number
7,421,082
Issue date
Sep 2, 2008
Sony Corporation
Shigeki Kamiya
G11 - INFORMATION STORAGE
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
7,401,988
Issue date
Jul 22, 2008
Tokyo Electron Limited
Takayuki Katano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Line width measuring method, substrate processing method, substrate...
Patent number
7,375,831
Issue date
May 20, 2008
Tokyo Electron Limited
Michio Tanaka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
7,208,066
Issue date
Apr 24, 2007
Tokyo Electron Limited
Junichi Kitano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Silylation treatment unit and method
Patent number
6,872,670
Issue date
Mar 29, 2005
Tokyo Electron Limited
Takayuki Toshima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for performing optical inspection utilizing diffr...
Patent number
6,864,971
Issue date
Mar 8, 2005
ISOA, Inc.
YouLing Lin
G01 - MEASURING TESTING
Information
Patent Grant
Silylation treatment unit and method
Patent number
6,709,523
Issue date
Mar 23, 2004
Tokyo Electron Limited
Takayuki Toshima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Digital broadcast transmitting method and digital broadcast transmi...
Patent number
6,622,303
Issue date
Sep 16, 2003
Sony Corporation
Masami Yamashita
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
6,485,203
Issue date
Nov 26, 2002
Tokyo Electron Limited
Takayuki Katano
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Digital multiplex transmission system
Patent number
5,506,903
Issue date
Apr 9, 1996
Sony Corporation
Masami Yamashita
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Grant
Passenger vehicle polling system having a central unit for polling...
Patent number
4,896,209
Issue date
Jan 23, 1990
Sony Corporation
Atsushi Matsuzaki
B64 - AIRCRAFT AVIATION COSMONAUTICS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20240096650
Publication date
Mar 21, 2024
TOKYO ELECTRON LIMITED
Shogo FUKUI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20220130690
Publication date
Apr 28, 2022
TOKYO ELECTRON LIMITED
Toru Ihara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20210159095
Publication date
May 27, 2021
TOKYO ELECTRON LIMITED
Toru Ihara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE CLEANING METHOD, AND RECORDI...
Publication number
20190118227
Publication date
Apr 25, 2019
TOKYO ELECTRON LIMITED
Meitoku AIBARA
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20180240684
Publication date
Aug 23, 2018
TOKYO ELECTRON LIMITED
Koji Egashira
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LIQUID PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND STORA...
Publication number
20170236729
Publication date
Aug 17, 2017
TOKYO ELECTRON LIMITED
Yosuke Kawabuchi
B08 - CLEANING
Information
Patent Application
METHOD OF TREATING A MICROELECTRONIC SUBSTRATE USING DILUTE TMAH
Publication number
20170141005
Publication date
May 18, 2017
TOKYO ELECTRON LIMITED
Wallace P. Printz
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING SYSTEM, SUBSTRATE...
Publication number
20160163534
Publication date
Jun 9, 2016
TOKYO ELECTRON LIMITED
Miyako KANEKO
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE CLEANING METHOD, AND RECORDI...
Publication number
20160035561
Publication date
Feb 4, 2016
TOKYO ELECTRON LIMITED
Meitoku AIBARA
B08 - CLEANING
Information
Patent Application
SUBSTRATE CLEANING METHOD AND RECORDING MEDIUM
Publication number
20160035564
Publication date
Feb 4, 2016
TOKYO ELECTRON LIMITED
Meitoku AIBARA
B08 - CLEANING
Information
Patent Application
SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING SYSTEM, SUBSTRATE...
Publication number
20140041685
Publication date
Feb 13, 2014
TOKYO ELECTRON LIMITED
Miyako KANEKO
B08 - CLEANING
Information
Patent Application
HEAT TREATMENT APPARATUS, HEAT TREATMENT METHOD, AND RECORDING MEDI...
Publication number
20100236477
Publication date
Sep 23, 2010
TOKYO ELECTRON LIMITED
Hikaru Ito
C21 - METALLURGY OF IRON
Information
Patent Application
HIGHLY THERMALLY CONDUCTIVE ACRYLIC ADHESIVE SHEET
Publication number
20100035494
Publication date
Feb 11, 2010
Denki Kagaku Kogyo Kabushiki Kaisha
Takuya Okada
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
HEAT TREATMENT APPARATUS, HEAT TREATMENT METHOD, AND RECORDING MEDI...
Publication number
20070251613
Publication date
Nov 1, 2007
TOKYO ELECTRON LIMITED
Hikaru Ito
C21 - METALLURGY OF IRON
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20070127916
Publication date
Jun 7, 2007
TOKYO ELECTRON LIMITED
Junichi Kitano
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Content delivery system and method, and content processing apparatu...
Publication number
20070130068
Publication date
Jun 7, 2007
Naohisa Kitazato
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Application
Multimedia-type contents reproduction device and reproduction metho...
Publication number
20070094143
Publication date
Apr 26, 2007
Masaya Yamamoto
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
License management method, information processing apparatus, inform...
Publication number
20070094736
Publication date
Apr 26, 2007
Jun Kitahara
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Method of controlling substrate processing apparatus and substrate...
Publication number
20070088450
Publication date
Apr 19, 2007
Shinichi Shinozuka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Substrate processing apparatus
Publication number
20050279281
Publication date
Dec 22, 2005
TOKYO ELECTRON LIMITED
Masami Yamashita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Position adjusting method and substrate processing system
Publication number
20050150451
Publication date
Jul 14, 2005
TOKYO ELECTRON LIMITED
Michio Tanaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Line width measuring method, substrate processing method, substrate...
Publication number
20050141891
Publication date
Jun 30, 2005
TOKYO ELECTRON LIMITED
Michio Tanaka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Silylation treatment unit and method
Publication number
20040142580
Publication date
Jul 22, 2004
TOKYO ELECTRON LIMITED
Takayuki Toshima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Substrate processing apparatus and substrate processing method
Publication number
20040050321
Publication date
Mar 18, 2004
TOKYO ELECTRON LIMITED
Junichi Kitano
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
System and method for performing optical inspection utilizing diffr...
Publication number
20020140930
Publication date
Oct 3, 2002
YouLin Lin
G01 - MEASURING TESTING
Information
Patent Application
Data delivery method and data delivery system
Publication number
20020106086
Publication date
Aug 8, 2002
Shigeki Kamiya
G11 - INFORMATION STORAGE
Information
Patent Application
Data delivery method and data delivery system
Publication number
20020094089
Publication date
Jul 18, 2002
Shigeki Kamiya
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Application
Substrate processing apparatus and substrate processing method
Publication number
20010013161
Publication date
Aug 16, 2001
TOKYO ELECTRON LIMITED
Junichi Kitano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate processing method and substrate processing apparatus
Publication number
20010014372
Publication date
Aug 16, 2001
TOKYO ELECTRON LIMITED
Takayuki Katano
H01 - BASIC ELECTRIC ELEMENTS