Masamichi Hara

Person

Yamanashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and charge neutralization method for...
- Patent number 11,862,439
- Issue date Jan 2, 2024
- Tokyo Electron Limited
- Takahiro Kawawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 10,468,237
- Issue date Nov 5, 2019
- Tokyo Electron Limited
- Atsushi Gomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 10,049,860
- Issue date Aug 14, 2018
- Tokyo Electron Limited
- Atsushi Gomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film forming method using reversible decomposition reaction
- Patent number 9,976,217
- Issue date May 22, 2018
- Tokyo Electron Limited
- Atsushi Gomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Trap assembly in film forming apparatus
- Patent number 9,896,761
- Issue date Feb 20, 2018
- Tokyo Electron Limited
- Masamichi Hara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cooling processing apparatus and method for operating the same
- Patent number 9,673,078
- Issue date Jun 6, 2017
- Tokyo Electron Limited
- Tetsuya Miyashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deposition device
- Patent number 9,404,180
- Issue date Aug 2, 2016
- Tokyo Electron Limited
- Masamichi Hara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Load lock device
- Patent number 9,303,788
- Issue date Apr 5, 2016
- Tokyo Electron Limited
- Masamichi Hara
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Method for forming barrier film on wiring line
- Patent number 9,293,417
- Issue date Mar 22, 2016
- Tokyo Electron Limited
- Hidenori Miyoshi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate mounting mechanism, and substrate processing apparatus
- Patent number 9,202,728
- Issue date Dec 1, 2015
- Tokyo Electron Limited
- Masamichi Hara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gate valve unit, substrate processing device and substrate processi...
- Patent number 9,121,515
- Issue date Sep 1, 2015
- Tokyo Electron Limited
- Kaoru Yamamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for film formation, apparatus for film formation, and comput...
- Patent number 9,062,374
- Issue date Jun 23, 2015
- Tokyo Electron Limited
- Masamichi Hara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mounting table structure, film forming apparatus and raw material r...
- Patent number 8,992,686
- Issue date Mar 31, 2015
- Tokyo Electron Limited
- Atsushi Gomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming copper wiring and method and system for forming c...
- Patent number 8,859,422
- Issue date Oct 14, 2014
- Tokyo Electron Limited
- Tadahiro Ishizaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Raw material recovery method and trapping mechanism for recovering...
- Patent number 8,408,025
- Issue date Apr 2, 2013
- Tokyo Electron Limited
- Atsushi Gomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of forming copper wiring and copper film, and film forming...
- Patent number 8,399,353
- Issue date Mar 19, 2013
- Tokyo Electron Limited
- Tadahiro Ishizaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal recovery method, metal recovery apparatus, gas exhaust system...
- Patent number 8,349,283
- Issue date Jan 8, 2013
- Tokyo Electron Limited
- Masamichi Hara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation method and film formation apparatus
- Patent number 8,277,889
- Issue date Oct 2, 2012
- Tokyo Electron Limited
- Atsushi Gomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for film formation, apparatus for film formation, and comput...
- Patent number 8,273,409
- Issue date Sep 25, 2012
- Tokyo Electron Limited
- Masamichi Hara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Integrated substrate processing in a vacuum processing tool
- Patent number 8,034,406
- Issue date Oct 11, 2011
- Tokyo Electron Limited
- Tadahiro Ishizaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240093362
- Publication date Mar 21, 2024
- TOKYO ELECTRON LIMITED
- Yuichi FURUYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20210388493
- Publication date Dec 16, 2021
- TOKYO ELECTRON LIMITED
- Yuta SORITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND CHARGE NEUTRALIZATION METHOD FOR...
- Publication number 20200312636
- Publication date Oct 1, 2020
- TOKYO ELECTRON LIMITED
- Takahiro KAWAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20180315585
- Publication date Nov 1, 2018
- TOKYO ELECTRON LIMITED
- Atsushi Gomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing System, Gate Valve and Substrate Transfer Method
- Publication number 20150371812
- Publication date Dec 24, 2015
- TOKYO ELECTRON LIMITED
- Kouji MAEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COOLING PROCESSING APPARATUS AND METHOD FOR OPERATING THE SAME
- Publication number 20150357222
- Publication date Dec 10, 2015
- TOKYO ELECTRON LIMITED
- Tetsuya MIYASHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20150235815
- Publication date Aug 20, 2015
- TOKYO ELECTRON LIMITED
- Atsushi Gomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRAP ASSEMBLY IN FILM FORMING APPARATUS
- Publication number 20150136027
- Publication date May 21, 2015
- TOKYO ELECTRON LIMITED
- Masamichi HARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLACING TABLE STRUCTURE
- Publication number 20150044368
- Publication date Feb 12, 2015
- TOKYO ELECTRON LIMITED
- Atsushi Gomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING COPPER WIRING AND METHOD AND SYSTEM FOR FORMING C...
- Publication number 20140287163
- Publication date Sep 25, 2014
- Tadahiro ISHIZAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOAD LOCK DEVICE
- Publication number 20140124069
- Publication date May 8, 2014
- TOKYO ELECTRON LIMITED
- Masamichi HARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND CLEANING METHOD FOR REMOVING METAL...
- Publication number 20140060572
- Publication date Mar 6, 2014
- TOKYO ELECTRON LIMITED
- Chiaki YASUMURO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GATE VALVE UNIT, SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSI...
- Publication number 20140003892
- Publication date Jan 2, 2014
- TOKYO ELECTRON LIMITED
- Kaoru Yamamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION DEVICE
- Publication number 20130000558
- Publication date Jan 3, 2013
- Masamichi Hara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE MOUNTING MECHANISM, AND SUBSTRATE PROCESSING
- Publication number 20120199573
- Publication date Aug 9, 2012
- TOKYO ELECTRON LIMITED
- Masamichi HARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING COPPER WIRING AND METHOD AND SYSTEM FOR FORMING C...
- Publication number 20120196052
- Publication date Aug 2, 2012
- TOKYO ELECTRON LIMITED
- Tadahiro ISHIZAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF FORMING COPPER WIRING AND COPPER FILM, AND FILM FORMING...
- Publication number 20120196437
- Publication date Aug 2, 2012
- TOKYO ELECTRON LIMITED
- Tadahiro ISHIZAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD
- Publication number 20120114869
- Publication date May 10, 2012
- TOKYO ELECTRON LIMITED
- Hidenori MIYOSHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MOUNTING TABLE STRUCTURE, FILM FORMING APPARATUS AND RAW MATERIAL R...
- Publication number 20120055403
- Publication date Mar 8, 2012
- TOKYO ELECTRON LIMITED
- Atsushi GOMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM PROCESSING APPARATUS
- Publication number 20120014768
- Publication date Jan 19, 2012
- TOKYO ELECTRON LIMITED
- Tetsuya MIYASHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Film Formation, Apparatus for Film Formation, and Comput...
- Publication number 20110300291
- Publication date Dec 8, 2011
- Masamichi Hara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLACING TABLE STRUCTURE
- Publication number 20110263123
- Publication date Oct 27, 2011
- TOKYO ELECTRON LIMITED
- Atsushi Gomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL RECOVERY METHOD, METAL RECOVERY APPARATUS, GAS EXHAUST SYSTEM...
- Publication number 20110206585
- Publication date Aug 25, 2011
- TOKYO ELECTRON LIMITED
- Masamichi Hara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RAW MATERIAL RECOVERY METHOD AND TRAPPING MECHANISM FOR RECOVERING...
- Publication number 20110203310
- Publication date Aug 25, 2011
- TOKYO ELECTRON LIMITED
- Atsushi Gomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FILM FORMATION, APPARATUS FOR FILM FORMATION, AND COMPUT...
- Publication number 20110092070
- Publication date Apr 21, 2011
- TOKYO ELECTRON LIMITED
- Masamichi Hara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RAW MATERIAL GAS SUPPLY SYSTEM AND FILM FORMING APPARATUS
- Publication number 20100236480
- Publication date Sep 23, 2010
- TOKYO ELECTRON LIMITED
- Masamichi Hara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE MOUNTING MECHANISM AND SUBSTRATE PROCESSING APPARATUS HAV...
- Publication number 20100212594
- Publication date Aug 26, 2010
- TOKYO ELECTRON LIMITED
- Masamichi HARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE MOUNTING MECHANISM, SUBSTRATE PROCESSING APPARATUS, METHO...
- Publication number 20100210115
- Publication date Aug 19, 2010
- TOKYO ELECTRON LIMITED
- Masamichi HARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION METHOD AND FILM FORMATION APPARATUS
- Publication number 20100075035
- Publication date Mar 25, 2010
- TOKYO ELECTRON LIMITED,
- Atsushi Gomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS SUPPLY METHOD AND GAS SUPPLY DEVICE
- Publication number 20100062158
- Publication date Mar 11, 2010
- TOKYO ELECTRON LIMITED
- Masamichi Hara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Masamichi Hara

Person

Patents Grantslast 30 patents

Substrate processing apparatus and charge neutralization method for...

Substrate processing apparatus

Substrate processing apparatus

Film forming method using reversible decomposition reaction

Trap assembly in film forming apparatus

Cooling processing apparatus and method for operating the same

Deposition device

Load lock device

Method for forming barrier film on wiring line

Substrate mounting mechanism, and substrate processing apparatus

Gate valve unit, substrate processing device and substrate processi...

Method for film formation, apparatus for film formation, and comput...

Mounting table structure, film forming apparatus and raw material r...

Method of forming copper wiring and method and system for forming c...

Raw material recovery method and trapping mechanism for recovering...

Methods of forming copper wiring and copper film, and film forming...

Metal recovery method, metal recovery apparatus, gas exhaust system...

Film formation method and film formation apparatus

Method for film formation, apparatus for film formation, and comput...

Integrated substrate processing in a vacuum processing tool

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

FILM FORMING APPARATUS AND FILM FORMING METHOD

SUBSTRATE PROCESSING APPARATUS AND CHARGE NEUTRALIZATION METHOD FOR...

SUBSTRATE PROCESSING APPARATUS

Substrate Processing System, Gate Valve and Substrate Transfer Method

COOLING PROCESSING APPARATUS AND METHOD FOR OPERATING THE SAME

SUBSTRATE PROCESSING APPARATUS

TRAP ASSEMBLY IN FILM FORMING APPARATUS

PLACING TABLE STRUCTURE

METHOD OF FORMING COPPER WIRING AND METHOD AND SYSTEM FOR FORMING C...

LOAD LOCK DEVICE

PLASMA PROCESSING APPARATUS AND CLEANING METHOD FOR REMOVING METAL...

GATE VALVE UNIT, SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSI...

DEPOSITION DEVICE

SUBSTRATE MOUNTING MECHANISM, AND SUBSTRATE PROCESSING

METHOD OF FORMING COPPER WIRING AND METHOD AND SYSTEM FOR FORMING C...

METHODS OF FORMING COPPER WIRING AND COPPER FILM, AND FILM FORMING...

FILM FORMING METHOD

MOUNTING TABLE STRUCTURE, FILM FORMING APPARATUS AND RAW MATERIAL R...

VACUUM PROCESSING APPARATUS

Method for Film Formation, Apparatus for Film Formation, and Comput...

PLACING TABLE STRUCTURE

METAL RECOVERY METHOD, METAL RECOVERY APPARATUS, GAS EXHAUST SYSTEM...

RAW MATERIAL RECOVERY METHOD AND TRAPPING MECHANISM FOR RECOVERING...

METHOD FOR FILM FORMATION, APPARATUS FOR FILM FORMATION, AND COMPUT...

RAW MATERIAL GAS SUPPLY SYSTEM AND FILM FORMING APPARATUS

SUBSTRATE MOUNTING MECHANISM AND SUBSTRATE PROCESSING APPARATUS HAV...

SUBSTRATE MOUNTING MECHANISM, SUBSTRATE PROCESSING APPARATUS, METHO...

FILM FORMATION METHOD AND FILM FORMATION APPARATUS

GAS SUPPLY METHOD AND GAS SUPPLY DEVICE