Masamichi Harada

Person

Shizuoka-ken, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method for forming Cu electrical interconnection film
- Patent number 8,476,161
- Issue date Jul 2, 2013
- Ulvac, Inc.
- Shoichiro Kumamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Barrier film producing method for a semiconductor
- Patent number 8,309,175
- Issue date Nov 13, 2012
- Ulvac, Inc.
- Masamichi Harada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing film
- Patent number 8,216,642
- Issue date Jul 10, 2012
- Ulvac, Inc.
- Masamichi Harada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective W-CVD method and method for forming multi-layered Cu elec...
- Patent number 7,790,590
- Issue date Sep 7, 2010
- ULVAC, Inc.
- Narishi Gonohe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming tungsten nitride film
- Patent number 7,338,900
- Issue date Mar 4, 2008
- Ulvac Inc.
- Eiichi Mizuno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for producing barrier film and barrier film thus produced
- Patent number 6,743,718
- Issue date Jun 1, 2004
- Nihon Shinku Gijutsu Kabushiki Kaisha
- Masamichi Harada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method for processing tungsten nitride film
- Patent number 6,312,761
- Issue date Nov 6, 2001
- ULVAC, Inc.
- Masamichi Harada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
FILM FORMING APPARATUS AND A BARRIER FILM PRODUCING METHOD
- Publication number 20120064716
- Publication date Mar 15, 2012
- ULVAC, Inc.
- Masamichi HARADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING CU ELECTRICAL INTERCONNECTION FILM
- Publication number 20110104890
- Publication date May 5, 2011
- Ulvac, Inc.
- Shoichiro Kumamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and Method of Film Formation
- Publication number 20090232984
- Publication date Sep 17, 2009
- Narishi Gonohe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND A BARRIER FILM PRODUCING METHOD
- Publication number 20090117271
- Publication date May 7, 2009
- ULVAC, Inc.
- Masamichi HARADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for Forming Cu Film
- Publication number 20090078580
- Publication date Mar 26, 2009
- ULVAC, Inc.
- Tomoyuki Yoshihama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Selective W-Cvd Method and Method for Forming Multi-Layered Cu Elec...
- Publication number 20080311741
- Publication date Dec 18, 2008
- Narishi Gonohe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of cleaning surface of semiconductor substrate, method of ma...
- Publication number 20070178234
- Publication date Aug 2, 2007
- ULVAC, Inc.
- Masamichi Harada
- B08 - CLEANING
Information Patent Application
Method for forming tungsten nitride film
- Publication number 20050221625
- Publication date Oct 6, 2005
- ULVAC, Inc.
- Eiichi Mizuno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of cleaning surface of semiconductor substrate, method of ma...
- Publication number 20050118810
- Publication date Jun 2, 2005
- ULVAC,INC
- Masamichi Harada
- B08 - CLEANING
Information Patent Application
Process for producing barrier film and barrier film thus produced
- Publication number 20020123215
- Publication date Sep 5, 2002
- ULVAC INC.
- Masamichi Harada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Film forming apparatus and method for producing tungsten nitride film
- Publication number 20020000199
- Publication date Jan 3, 2002
- Masamichi Harada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Masamichi Harada

Person

Patents Grantslast 30 patents

Method for forming Cu electrical interconnection film

Barrier film producing method for a semiconductor

Method of manufacturing film

Selective W-CVD method and method for forming multi-layered Cu elec...

Method for forming tungsten nitride film

Process for producing barrier film and barrier film thus produced

Film forming method for processing tungsten nitride film

Patents Applicationslast 30 patents

FILM FORMING APPARATUS AND A BARRIER FILM PRODUCING METHOD

METHOD FOR FORMING CU ELECTRICAL INTERCONNECTION FILM

Apparatus and Method of Film Formation

FILM FORMING APPARATUS AND A BARRIER FILM PRODUCING METHOD

Method for Forming Cu Film

Selective W-Cvd Method and Method for Forming Multi-Layered Cu Elec...

Method of cleaning surface of semiconductor substrate, method of ma...

Method for forming tungsten nitride film

Method of cleaning surface of semiconductor substrate, method of ma...

Process for producing barrier film and barrier film thus produced

Film forming apparatus and method for producing tungsten nitride film