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Masamichi Inenaga
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Fukuoka, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Wafer pre-alignment apparatus and method
Patent number
7,436,513
Issue date
Oct 14, 2008
Kabushiki Kaisha Yaskawa Denki
Masamichi Inenaga
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Absolute encoder and absolute value signal generation method
Patent number
7,266,567
Issue date
Sep 4, 2007
Kabushiki Kaisha Yasakawa Denki
Masamichi Inenaga
G01 - MEASURING TESTING
Information
Patent Grant
Techniques for wafer prealignment and sensing edge position
Patent number
7,154,113
Issue date
Dec 26, 2006
Kabushiki Kaisha Yaskawa Denki
Masamichi Inenaga
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Techniques for wafer prealignment and sensing edge positions
Patent number
7,109,511
Issue date
Sep 19, 2006
Kabushiki Kaisha Yaskawa Denki
Masamichi Inenaga
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Absolute encoder
Patent number
6,384,752
Issue date
May 7, 2002
Kabushiki Kaisha Yaskawa Denki
Koji Suzuki
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
Wafer prealignment apparatus, its method for judging wafer presence...
Publication number
20060038142
Publication date
Feb 23, 2006
Kabushiki Kaisha Yaskawa Denki
Masamichi Inenaga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Wafer pre-alignment apparatus and method
Publication number
20050231721
Publication date
Oct 20, 2005
Masamichi Inenaga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Absolute encoder and absolute value signal generation method
Publication number
20050122242
Publication date
Jun 9, 2005
Kabushiki Kaisha Yaskawa Denki
Masamichi Inenaga
G01 - MEASURING TESTING
Information
Patent Application
Wafer prealignment apparatus, its method for judging wafer presence...
Publication number
20040056216
Publication date
Mar 25, 2004
Masamichi Inenaga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY