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Yamanashi, JP
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last 30 patents
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Patent Grant
Processing apparatus
Patent number
8,299,671
Issue date
Oct 30, 2012
Tokyo Electron Limited
Masamichi Nomura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Annealing apparatus
Patent number
8,246,900
Issue date
Aug 21, 2012
Tokyo Electron Limited
Shigeru Kasai
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Heating apparatus, and processing apparatus
Patent number
6,121,579
Issue date
Sep 19, 2000
Tokyo Electron Limited
Kazutsugu Aoki
C30 - CRYSTAL GROWTH
Patents Applications
last 30 patents
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Patent Application
ANNEALING APPARATUS
Publication number
20120279944
Publication date
Nov 8, 2012
TOKYO ELECTRON LIMITED
Shigeru KASAI
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Application
PROCESSING APPARATUS AND METHOD FOR OPERATING SAME
Publication number
20120118504
Publication date
May 17, 2012
TOKYO ELECTRON LIMITED
Masamichi Nomura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESSING APPARATUS
Publication number
20100164315
Publication date
Jul 1, 2010
TOKYO ELECTRON LIMITED
Masamichi Nomura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ANNEALING APPARATUS
Publication number
20100038833
Publication date
Feb 18, 2010
Tokyo Electron Limited
Shigeru Kasai
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...