Masamichi Yachi

Person

Toyama-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus capable of adjusting inner pressure...
- Patent number 11,846,025
- Issue date Dec 19, 2023
- Kokusai Electric Corporation
- Masamichi Yachi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of processing substrate, and...
- Patent number 9,548,229
- Issue date Jan 17, 2017
- Hitachi Kokusai Electric Inc.
- Masamichi Yachi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND EXHAUST SYSTEM CAPABLE OF ADJUST...
- Publication number 20240076780
- Publication date Mar 7, 2024
- Kokusai Electric Corporation
- Masamichi YACHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20230332288
- Publication date Oct 19, 2023
- Kokusai Electric Corporation
- Masamichi YACHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTURING...
- Publication number 20230095537
- Publication date Mar 30, 2023
- Kokusai Electric Corporation
- Ryosuke TAKAHASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND NON-TRANSITORY COMPUTER-READABLE...
- Publication number 20210040619
- Publication date Feb 11, 2021
- Kokusai Electric Corporation
- Masamichi YACHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING APPARATUS AND EXHAUST SYSTEM
- Publication number 20200392620
- Publication date Dec 17, 2020
- Kokusai Electric Corporation
- Masanori OKUNO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, AND...
- Publication number 20150279712
- Publication date Oct 1, 2015
- Hitachi Kokusai Electric Inc.
- Masamichi Yachi
- H01 - BASIC ELECTRIC ELEMENTS

Masamichi Yachi

Person

Patents Grantslast 30 patents

Substrate processing apparatus capable of adjusting inner pressure...

Substrate processing apparatus, method of processing substrate, and...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND EXHAUST SYSTEM CAPABLE OF ADJUST...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTURING...

SUBSTRATE PROCESSING APPARATUS AND NON-TRANSITORY COMPUTER-READABLE...

PROCESSING APPARATUS AND EXHAUST SYSTEM

SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, AND...