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Masanaga Fukusawa
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Tokyo, JP
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last 30 patents
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Patent Grant
Plasma treatment method, plasma treatment apparatus, and semiconduc...
Patent number
10,074,517
Issue date
Sep 11, 2018
Sony Corporation
Nobuyuki Kuboi
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
PLASMA TREATMENT METHOD, PLASMA TREATMENT APPARATUS, AND SEMICONDUC...
Publication number
20130017672
Publication date
Jan 17, 2013
SONY CORPORATION
Nobuyuki Kuboi
H01 - BASIC ELECTRIC ELEMENTS