Masanao Ando

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Rensselaer, NY, US

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Patents Grantslast 30 patents

Information Patent Grant
Method for in-situ refurbishing a ceramic substrate holder
- Patent number 7,989,353
- Issue date Aug 2, 2011
- Tokyo Electron Limited
- Tadahiro Ishizaka
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR IN-SITU REFURBISHING A CERAMIC SUBSTRATE HOLDER
- Publication number 20090166327
- Publication date Jul 2, 2009
- TOKYO ELECTRON LIMITED
- Tadahiro Ishizaka
- H01 - BASIC ELECTRIC ELEMENTS