Masanao Fukuda

Person

Toyama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of manufacturing semiconductor device and method of processi...
- Patent number 10,290,494
- Issue date May 14, 2019
- Kokusai Electric Corporation
- Masanao Fukuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reaction tube, substrate processing apparatus, and method of manufa...
- Patent number 9,412,582
- Issue date Aug 9, 2016
- Hitachi Kokusai Electric Inc.
- Takafumi Sasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus including shielding unit for suppres...
- Patent number 9,084,298
- Issue date Jul 14, 2015
- Hitachi Kokusai Electric Inc.
- Yukitomo Hirochi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Heat treatment apparatus
- Patent number 9,074,284
- Issue date Jul 7, 2015
- Hitachi Kokusai Electric, Inc.
- Masanao Fukuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 9,028,614
- Issue date May 12, 2015
- Hitachi Kokusai Electric Inc.
- Daisuke Hara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of processing substrate and...
- Patent number 8,901,013
- Issue date Dec 2, 2014
- Hitachi Kokusai Electric Inc.
- Kazuhiro Yuasa
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20160322217
- Publication date Nov 3, 2016
- Hitachi Kokusai Electric Inc.
- Masanao FUKUDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REACTION TUBE, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFA...
- Publication number 20150270125
- Publication date Sep 24, 2015
- Hitachi Kokusai Electric Inc.
- Takafumi SASAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE AND...
- Publication number 20130157474
- Publication date Jun 20, 2013
- Hitachi Kokusai Electric Inc.
- Kazuhiro Yuasa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, WAFER HOLDER, AND METHOD OF MANUFAC...
- Publication number 20120220107
- Publication date Aug 30, 2012
- Hitachi Kokusai Electric Inc.
- Masanao Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SUBSTRATE
- Publication number 20120220108
- Publication date Aug 30, 2012
- Hitachi Kokusai Electric Inc.
- Daisuke Hara
- C30 - CRYSTAL GROWTH
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SUBSTRATE,...
- Publication number 20120156886
- Publication date Jun 21, 2012
- Hitachi Kokusai Electric Inc.
- Kenji Shirako
- C30 - CRYSTAL GROWTH
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SEMICONDUCTOR DEVICE MANUFACTURING...
- Publication number 20110306212
- Publication date Dec 15, 2011
- Hitachi Kokusai Electric Inc.
- Akihiro SATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor processing apparatus
- Publication number 20110253049
- Publication date Oct 20, 2011
- Hitachi Kokusai Electric Inc.
- Masanao Fukuda
- C30 - CRYSTAL GROWTH
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20110210118
- Publication date Sep 1, 2011
- Hitachi Kokusai Electric Inc.
- Yukitomo HIROCHI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSI...
- Publication number 20110065286
- Publication date Mar 17, 2011
- Hitachi Kokusai Electric Inc.
- Takafumi SASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT TREATMENT APPARATUS AND METHOD OF HEAT TREATMENT
- Publication number 20100282166
- Publication date Nov 11, 2010
- Hitachi Kokusai Electric Inc.
- Masanao FUKUDA
- C30 - CRYSTAL GROWTH
Information Patent Application
HEAT TREATMENT APPARATUS
- Publication number 20100275848
- Publication date Nov 4, 2010
- Hitachi Kokusai Electric Inc.
- Masanao Fukuda
- C30 - CRYSTAL GROWTH
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20100035440
- Publication date Feb 11, 2010
- Hitachi Kokusai Electric, Inc.
- Masanao Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor processing apparatus
- Publication number 20090029561
- Publication date Jan 29, 2009
- Hitachi Kokusai Electric Inc.
- Masanao Fukuda
- C30 - CRYSTAL GROWTH

Masanao Fukuda

Person

Patents Grantslast 30 patents

Method of manufacturing semiconductor device and method of processi...

Reaction tube, substrate processing apparatus, and method of manufa...

Substrate processing apparatus including shielding unit for suppres...

Heat treatment apparatus

Substrate processing apparatus

Substrate processing apparatus, method of processing substrate and...

Patents Applicationslast 30 patents

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

REACTION TUBE, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFA...

SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE AND...

SUBSTRATE PROCESSING APPARATUS, WAFER HOLDER, AND METHOD OF MANUFAC...

SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SUBSTRATE

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SUBSTRATE,...

SUBSTRATE PROCESSING APPARATUS, SEMICONDUCTOR DEVICE MANUFACTURING...

Semiconductor processing apparatus

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSI...

HEAT TREATMENT APPARATUS AND METHOD OF HEAT TREATMENT

HEAT TREATMENT APPARATUS

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

Semiconductor processing apparatus