Masanao Matsushita

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Gate valve and substrate processing apparatus equipped with the same
- Patent number 8,590,861
- Issue date Nov 26, 2013
- Tokyo Electron Limited
- Tsutomu Hiroki
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...

Patents Applicationslast 30 patents

Information Patent Application
GATE VALVE AND SUBSTRATE PROCESSING APPARATUS EQUIPPED WITH THE SAME
- Publication number 20120055400
- Publication date Mar 8, 2012
- TOKYO ELECTRON LIMITED
- Tsutomu Hiroki
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...