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Masanobu Ezaki
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Koriyama-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Titania-doped quartz glass and making method
Patent number
10,114,280
Issue date
Oct 30, 2018
Shin-Etsu Chemical Co., Ltd.
Shigeru Maida
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Titania-doped quartz glass and making method
Patent number
9,746,773
Issue date
Aug 29, 2017
Shin-Etsu Chemical Co., Ltd.
Shigeru Maida
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Titania doped quartz glass and making method
Patent number
9,296,636
Issue date
Mar 29, 2016
Shin-Etsu Chemical Co., Ltd.
Shigeru Maida
C03 - GLASS MINERAL OR SLAG WOOL
Information
Patent Grant
EUV lithography member, making method, and titania-doped quartz glass
Patent number
9,278,881
Issue date
Mar 8, 2016
Shin-Etsu Chemical Co., Ltd.
Shigeru Maida
C03 - GLASS MINERAL OR SLAG WOOL
Patents Applications
last 30 patents
Information
Patent Application
TITANIA-DOPED QUARTZ GLASS AND MAKING METHOD
Publication number
20170038672
Publication date
Feb 9, 2017
Shin-Etsu Chemical Co., Ltd.
Shigeru Maida
C03 - GLASS MINERAL OR SLAG WOOL
Information
Patent Application
EUV LITHOGRAPHY MEMBER, MAKING METHOD, AND TITANIA-DOPED QUARTZ GLASS
Publication number
20140206524
Publication date
Jul 24, 2014
Shin-Etsu Chemical Co., Ltd.
Shigeru Maida
C03 - GLASS MINERAL OR SLAG WOOL
Information
Patent Application
TITANIA-DOPED QUARTZ GLASS AND MAKING METHOD
Publication number
20130283858
Publication date
Oct 31, 2013
Shin-Etsu Chemical Co., Ltd.
Shigeru Maida
B82 - NANO-TECHNOLOGY
Information
Patent Application
TITANIA-DOPED QUARTZ GLASS AND MAKING METHOD
Publication number
20120258389
Publication date
Oct 11, 2012
Shin-Etsu Chemical Co., Ltd.
Shigeru Maida
C03 - GLASS MINERAL OR SLAG WOOL
Information
Patent Application
TITANIA-DOPED QUARTZ GLASS AND MAKING METHOD
Publication number
20110159413
Publication date
Jun 30, 2011
Shin-Etsu Chemical Co., Ltd.
Shigeru Maida
B82 - NANO-TECHNOLOGY