Masanobu IGETA

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Systems and methods for improving planarity using selective atomic...
- Patent number 11,823,910
- Issue date Nov 21, 2023
- Tokyo Electron Limited
- David O'Meara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation method, film formation apparatus and storage medium
- Patent number 8,853,100
- Issue date Oct 7, 2014
- Tokyo Electron Limited
- Masanobu Igeta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming insulating film on substrate, method for manufac...
- Patent number 7,378,358
- Issue date May 27, 2008
- Tokyo Electron Limited
- Masanobu Igeta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and a computer readable storage medium...
- Patent number 7,129,185
- Issue date Oct 31, 2006
- Tokyo Electron Limited
- Shintaro Aoyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and device for processing substrate, and apparatus for manuf...
- Patent number 7,125,799
- Issue date Oct 24, 2006
- Tokyo Electron Limited
- Shintaro Aoyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Radical processing of a sub-nanometer insulation film
- Patent number 6,927,112
- Issue date Aug 9, 2005
- Tokyo Electron Limited
- Masanobu Igeta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SYSTEMS AND METHODS FOR IMPROVING PLANARITY USING SELECTIVE ATOMIC...
- Publication number 20240047218
- Publication date Feb 8, 2024
- TOKYO ELECTRON LIMITED
- David O'Meara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE
- Publication number 20230411146
- Publication date Dec 21, 2023
- TOKYO ELECTRON LIMITED
- Hiroki MURAKAMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Systems and Methods for Improving Planarity using Selective Atomic...
- Publication number 20220037162
- Publication date Feb 3, 2022
- TOKYO ELECTRON LIMITED
- David O'Meara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD FOR FORMING INNER SPACERS IN A NANO-SHE...
- Publication number 20210376123
- Publication date Dec 2, 2021
- TOKYO ELECTRON LIMITED
- Shimpei YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Film Forming Method and Film Forming Apparatus
- Publication number 20160322218
- Publication date Nov 3, 2016
- TOKYO ELECTRON LIMITED
- Noriaki FUKIAGE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION METHOD, FILM FORMATION APPARATUS AND STORAGE MEDIUM
- Publication number 20140004713
- Publication date Jan 2, 2014
- Masanobu IGETA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Radical Processing of a Sub-Nanometer Insulation Film
- Publication number 20080139000
- Publication date Jun 12, 2008
- TOKYO ELECTRON LIMITED
- Masanobu Igeta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE TREATER, A...
- Publication number 20070190802
- Publication date Aug 16, 2007
- TOKYO ELECTRON LIMITED
- SHINTARO AOYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate treating apparatus and method of substrate treatment
- Publication number 20060174833
- Publication date Aug 10, 2006
- TOKYO ELECTRON LIMITED
- Kazuyoshi Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for forming insulating film on substrate, method for manufac...
- Publication number 20060009044
- Publication date Jan 12, 2006
- Masanobu Igeta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Radical processing of a sub-nanometer insulation film
- Publication number 20050170541
- Publication date Aug 4, 2005
- TOKYO ELECTRON LIMITED
- Masanobu Igeta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing method and a computer readable storage medium...
- Publication number 20050079720
- Publication date Apr 14, 2005
- TOKYO ELECTRON LIMITED
- Shintaro Aoyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and device for processing substrate, and apparatus for manuf...
- Publication number 20040241991
- Publication date Dec 2, 2004
- Shintaro Aoyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for film formation of gate insulator, apparatus for film for...
- Publication number 20040053472
- Publication date Mar 18, 2004
- Hideki Kiryu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for manufacturing semiconductor device, substrate treater, a...
- Publication number 20040023513
- Publication date Feb 5, 2004
- Shintaro Aoyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Radical processing of a sub-nanometer insulation film
- Publication number 20030170945
- Publication date Sep 11, 2003
- TOKYO ELECTRON LIMITED
- Masanobu Igeta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Masanobu IGETA

Person

Patents Grantslast 30 patents

Systems and methods for improving planarity using selective atomic...

Film formation method, film formation apparatus and storage medium

Method for forming insulating film on substrate, method for manufac...

Substrate processing method and a computer readable storage medium...

Method and device for processing substrate, and apparatus for manuf...

Radical processing of a sub-nanometer insulation film

Patents Applicationslast 30 patents

SYSTEMS AND METHODS FOR IMPROVING PLANARITY USING SELECTIVE ATOMIC...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE

Systems and Methods for Improving Planarity using Selective Atomic...

SUBSTRATE PROCESSING METHOD FOR FORMING INNER SPACERS IN A NANO-SHE...

Film Forming Method and Film Forming Apparatus

FILM FORMATION METHOD, FILM FORMATION APPARATUS AND STORAGE MEDIUM

Radical Processing of a Sub-Nanometer Insulation Film

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE TREATER, A...

Substrate treating apparatus and method of substrate treatment

Method for forming insulating film on substrate, method for manufac...

Radical processing of a sub-nanometer insulation film

Substrate processing method and a computer readable storage medium...

Method and device for processing substrate, and apparatus for manuf...

Method for film formation of gate insulator, apparatus for film for...

Method for manufacturing semiconductor device, substrate treater, a...

Radical processing of a sub-nanometer insulation film