Masanobu Watanabe

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Kumamoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method, substrate processing apparatus and sto...
- Patent number 10,295,903
- Issue date May 21, 2019
- Tokyo Electron Limited
- Shinichi Hatakeyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Processing gas generating apparatus, processing gas generating meth...
- Patent number 10,141,209
- Issue date Nov 27, 2018
- Tokyo Electron Limited
- Masashi Itonaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS AND STO...
- Publication number 20180059539
- Publication date Mar 1, 2018
- TOKYO ELECTRON LIMITED
- Shinichi Hatakeyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROCESSING GAS GENERATING APPARATUS, PROCESSING GAS GENERATING METH...
- Publication number 20150246329
- Publication date Sep 3, 2015
- TOKYO ELECTRON LIMITED
- Masashi Itonaga
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL