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Masanori ASAHARA
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Miyagi, JP
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Patents Grants
last 30 patents
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Patent Grant
Etching method and plasma processing apparatus
Patent number
11,373,895
Issue date
Jun 28, 2022
Tokyo Electron Limited
Fumiaki Ariyoshi
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Member and plasma processing apparatus
Patent number
11,037,763
Issue date
Jun 15, 2021
Tokyo Electron Limited
Yuki Sugawara
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20240079215
Publication date
Mar 7, 2024
TOKYO ELECTRON LIMITED
Tetsuma YAGUCHI
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20240079219
Publication date
Mar 7, 2024
TOKYO ELECTRON LIMITED
Masanori ASAHARA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20210142990
Publication date
May 13, 2021
TOKYO ELECTRON LIMITED
Masanori Asahara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20210005503
Publication date
Jan 7, 2021
TOKYO ELECTRON LIMITED
Fumiaki ARIYOSHI
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
MEMBER AND PLASMA PROCESSING APPARATUS
Publication number
20180350567
Publication date
Dec 6, 2018
TOKYO ELECTRON LIMITED
Yuki SUGAWARA
H01 - BASIC ELECTRIC ELEMENTS