Masanori ASAHARA

Person

  • Miyagi, JP

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS

    • Publication number 20240079215
    • Publication date Mar 7, 2024
    • TOKYO ELECTRON LIMITED
    • Tetsuma YAGUCHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS

    • Publication number 20240079219
    • Publication date Mar 7, 2024
    • TOKYO ELECTRON LIMITED
    • Masanori ASAHARA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS

    • Publication number 20210142990
    • Publication date May 13, 2021
    • TOKYO ELECTRON LIMITED
    • Masanori Asahara
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ETCHING METHOD AND PLASMA PROCESSING APPARATUS

    • Publication number 20210005503
    • Publication date Jan 7, 2021
    • TOKYO ELECTRON LIMITED
    • Fumiaki ARIYOSHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    MEMBER AND PLASMA PROCESSING APPARATUS

    • Publication number 20180350567
    • Publication date Dec 6, 2018
    • TOKYO ELECTRON LIMITED
    • Yuki SUGAWARA
    • H01 - BASIC ELECTRIC ELEMENTS