Masanori Honda

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Tochigi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Temperature adjustment apparatus, exposure apparatus having the sam...
- Patent number 7,250,616
- Issue date Jul 31, 2007
- Canon Kabushiki Kaisha
- Masanori Honda
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Grant
Temperature adjustment apparatus, exposure apparatus having the sam...
- Patent number 6,992,306
- Issue date Jan 31, 2006
- Canon Kabushiki Kaisha
- Masanori Honda
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Grant
Mirror holding mechanism in exposure apparatus, and device manufact...
- Patent number 6,982,841
- Issue date Jan 3, 2006
- Canon Kabushiki Kaisha
- Yoshiki Kino
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
Temperature adjustment apparatus, exposure apparatus having the sam...
- Publication number 20060151724
- Publication date Jul 13, 2006
- Canon Kabushiki Kaisha
- Masanori Honda
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Application
Mirror holding mechanism in exposure apparatus, and device manufact...
- Publication number 20060072219
- Publication date Apr 6, 2006
- Yoshiki Kino
- G02 - OPTICS
Information Patent Application
Temperature adjustment apparatus, exposure apparatus having the sam...
- Publication number 20040262541
- Publication date Dec 30, 2004
- Masanori Honda
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Application
Mirror holding mechanism in exposure apparatus, and device manufact...
- Publication number 20040218289
- Publication date Nov 4, 2004
- Yoshiki Kino
- G02 - OPTICS