Masanori Ito

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Kanagawa, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate lifting apparatus and substrate transferring method
- Patent number 12,020,967
- Issue date Jun 25, 2024
- ULVAC TECHNO, LTD.
- Katsunori Fujii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Power supply apparatus for electrostatic chuck and substrate contro...
- Patent number 11,257,702
- Issue date Feb 22, 2022
- ULVAC TECHNO, LTD.
- Katsunori Fujii
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
Substrate Lifting Apparatus and Substrate Transferring Method
- Publication number 20230163010
- Publication date May 25, 2023
- ULVAC TECHNO, LTD.
- Katsunori Fujii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Power Supply Apparatus for Electrostatic Chuck and Substrate Contro...
- Publication number 20200411356
- Publication date Dec 31, 2020
- ULVAC TECHNO, LTD.
- Katsunori Fujii
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER