Masanori Katsuyama

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Patents Grantslast 30 patents

Information Patent Grant
Removing damage caused by plasma etching and high energy implantati...
- Patent number 5,543,336
- Issue date Aug 6, 1996
- Hitachi, Ltd.
- Hiromichi Enami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and equipment for plasma processing
- Patent number 5,401,356
- Issue date Mar 28, 1995
- Hitachi, Ltd.
- Hiromichi Enami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Etching method and etching apparatus therefor
- Patent number 5,352,324
- Issue date Oct 4, 1994
- Hitachi, Ltd.
- Yasushi Gotoh
- H01 - BASIC ELECTRIC ELEMENTS