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Masanori Miyazaki
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Sendai, JP
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last 30 patents
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Patent Grant
Single chamber for CVD and sputtering film manufacturing
Patent number
5,755,938
Issue date
May 26, 1998
Alps Electric Co., Ltd.
Hirofumi Fukui
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film manufacturing method using single reaction chamber for chemica...
Patent number
5,609,737
Issue date
Mar 11, 1997
Frontec Incorporated
Hirofumi Fukui
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of fabricating a thin film transistor wherein the gate termi...
Patent number
5,573,958
Issue date
Nov 12, 1996
Frontec Incorporated
Hirofumi Fukui
G02 - OPTICS
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Patent Grant
Method of sputtering a silicon nitride film
Patent number
5,550,091
Issue date
Aug 27, 1996
Frontec Incorporated
Koichi Fukuda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...