Masanori Obata

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Itami, JP

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Patents Grantslast 30 patents

Information Patent Grant
Automatic thin-film measuring apparatus
- Patent number 5,321,634
- Issue date Jun 14, 1994
- Mitsubishi Denki Kabushiki Kaisha
- Masanori Obata
- G01 - MEASURING TESTING
Information Patent Grant
Semiconductor device and manufacturing method thereof
- Patent number 5,306,947
- Issue date Apr 26, 1994
- Mitsubishi Denki Kabushiki Kaisha
- Hiroshi Adachi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical vapor deposition apparatus having cooling heads adjacent t...
- Patent number 4,913,090
- Issue date Apr 3, 1990
- Mitsubishi Denki Kabushiki Kaisha
- Shigeru Harada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Laser polishing semiconductor wafer
- Patent number 4,731,516
- Issue date Mar 15, 1988
- Mitsubishi Denki Kabushiki Kaisha
- Takeshi Noguchi
- H01 - BASIC ELECTRIC ELEMENTS