Masanori Ono

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Chiba-Prefecture, JP

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Patents Grantslast 30 patents

Information Patent Grant
Turbo-Molecular pump with metal matrix composite rotor and stator
- Patent number 6,095,754
- Issue date Aug 1, 2000
- Applied Materials, Inc.
- Masanori Ono
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...