Masao FURUYA

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Yamanashi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus, electrode temperature adjustment devic...
- Patent number 8,864,932
- Issue date Oct 21, 2014
- Tokyo Electron Limited
- Masao Furuya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cooling apparatus and plasma processing apparatus having cooling ap...
- Patent number 7,000,416
- Issue date Feb 21, 2006
- Tokyo Electron Limited
- Takaaki Hirooka
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Grant
Processing apparatus and processing apparatus maintenance method
- Patent number 6,993,919
- Issue date Feb 7, 2006
- Tokyo Electron Limited
- Takaaki Hirooka
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Processor and temperature control method therefor
- Patent number 6,629,423
- Issue date Oct 7, 2003
- Tokyo Electron Limited
- Takaaki Hirooka
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS, ELECTRODE TEMPERATURE ADJUSTMENT DEVIC...
- Publication number 20090044752
- Publication date Feb 19, 2009
- TOKYO ELECTRON LIMITED
- Masao FURUYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Temperature control method and apparatus, and plasma processing app...
- Publication number 20060213763
- Publication date Sep 28, 2006
- TOKYO ELECTRON LIMITED
- Masao Furuya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Processing apparatus and processing apparatus maintenance method
- Publication number 20050155373
- Publication date Jul 21, 2005
- TOKYO ELECTRON LIMITED
- Takaaki Hirooka
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Application
Electrode cooler of processing device
- Publication number 20040068997
- Publication date Apr 15, 2004
- Takaaki Hirooka
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...