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Masao Iga
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Okayama-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate treatment process and apparatus
Patent number
6,983,756
Issue date
Jan 10, 2006
m·FSI Ltd.
Kousaku Matsuno
B08 - CLEANING
Information
Patent Grant
Substrate cleaning apparatus
Patent number
6,874,516
Issue date
Apr 5, 2005
m·FSI Ltd.
Kousaku Matsuno
B08 - CLEANING
Information
Patent Grant
Substrate treatment process and apparatus
Patent number
6,743,301
Issue date
Jun 1, 2004
m&Circlesolid;FSI Ltd.
Kousaku Matsuno
B08 - CLEANING
Patents Applications
last 30 patents
Information
Patent Application
Substrate cleaning apparatus
Publication number
20050183749
Publication date
Aug 25, 2005
m . FSI LTD.
Kousaku Matsuno
B08 - CLEANING
Information
Patent Application
Substrate cleaning apparatus
Publication number
20050183750
Publication date
Aug 25, 2005
m . FSI LTD.
Kousaku Matsuno
B08 - CLEANING
Information
Patent Application
Substrate cleaning apparatus
Publication number
20050150530
Publication date
Jul 14, 2005
m . FSI LTD.
Kousaku Matsuno
B08 - CLEANING
Information
Patent Application
Substrate treatment process and apparatus
Publication number
20040194812
Publication date
Oct 7, 2004
m . FSI LTD.
Kousaku Matsuno
B08 - CLEANING
Information
Patent Application
Substrate Cleaning apparatus
Publication number
20030005948
Publication date
Jan 9, 2003
m . FSI LTD.
Kousaku Matsuno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate treatment process and apparatus
Publication number
20010009155
Publication date
Jul 26, 2001
m . FSI LTD.
Kousaku Matsuno
B08 - CLEANING