Masao Kosugi

Person

Yokohama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Projection and exposure apparatus including an optical member and a...
- Patent number 6,144,504
- Issue date Nov 7, 2000
- Canon Kabushiki Kaisha
- Yuji Sudoh
- G02 - OPTICS
Information Patent Grant
Projection exposure apparatus and microdevice manufacturing method...
- Patent number 5,999,270
- Issue date Dec 7, 1999
- Canon Kabushiki Kaisha
- Tetsuya Mori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment and exposure apparatus
- Patent number 5,386,269
- Issue date Jan 31, 1995
- Canon Kabushiki Kaisha
- Masao Kosugi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment and exposure apparatus and method for manufacture of inte...
- Patent number 5,365,342
- Issue date Nov 15, 1994
- Canon Kabushiki Kaisha
- Naoki Ayata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method and apparatus
- Patent number 5,262,822
- Issue date Nov 16, 1993
- Canon Kabushiki Kaisha
- Masao Kosugi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment and exposure apparatus
- Patent number 5,160,957
- Issue date Nov 3, 1992
- Canon Kabushiki Kaisha
- Hideki Ina
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus
- Patent number 5,137,363
- Issue date Aug 11, 1992
- Canon Kabushiki Kaisha
- Masao Kosugi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure system including a device for analyzing an affect of a waf...
- Patent number 5,120,134
- Issue date Jun 9, 1992
- Canon Kabushiki Kaisha
- Masao Kosugi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Precision actuator
- Patent number 5,053,670
- Issue date Oct 1, 1991
- Canon Kabushiki Kaisha
- Masao Kosugi
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Alignment and exposure apparatus and method for manufacture of inte...
- Patent number 5,050,111
- Issue date Sep 17, 1991
- Canon Kabushiki Kaisha
- Naoki Ayata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment and exposure apparatus and method for manufacture of inte...
- Patent number 4,937,618
- Issue date Jun 26, 1990
- Canon Kabushiki Kaisha
- Naoki Ayata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Step-and-repeat alignment and exposure method and apparatus
- Patent number 4,910,679
- Issue date Mar 20, 1990
- Canon Kabushiki Kaisha
- Kazuo Takahashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Observation system for a projection exposure apparatus
- Patent number 4,888,614
- Issue date Dec 19, 1989
- Canon Kabushiki Kaisha
- Akiyoshi Suzuki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Step-and-repeat alignment and exposure method and apparatus
- Patent number 4,843,563
- Issue date Jun 27, 1989
- Canon Kabushiki Kaisha
- Kazuo Takahashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Step and repeat exposure apparatus having improved system for aligning
- Patent number 4,823,012
- Issue date Apr 18, 1989
- Canon Kabushiki Kaisha
- Masao Kosugi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus
- Patent number 4,814,829
- Issue date Mar 21, 1989
- Canon Kabushiki Kaisha
- Masao Kosugi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus
- Patent number 4,786,947
- Issue date Nov 22, 1988
- Canon Kabushiki Kaisha
- Masao Kosugi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Container for a sheet-like article
- Patent number 4,776,462
- Issue date Oct 11, 1988
- Canon Kabushiki Kaisha
- Masao Kosugi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for processing a plate-like workpiece
- Patent number 4,775,877
- Issue date Oct 4, 1988
- Canon Kabushiki Kaisha
- Masao Kosugi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask storing mechanism
- Patent number 4,757,355
- Issue date Jul 12, 1988
- Canon Kabushiki Kaisha
- Kazuo Iizuka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Semiconductor circuit manufacturing apparatus having selectively op...
- Patent number 4,719,357
- Issue date Jan 12, 1988
- Canon Kabushiki Kaisha
- Naoki Ayata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus having an alignment light of a wavele...
- Patent number 4,682,037
- Issue date Jul 21, 1987
- Canon Kabushiki Kaisha
- Masao Kosugi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device for adjusting projection magnification
- Patent number 4,676,631
- Issue date Jun 30, 1987
- Canon Kabushiki Kaisha
- Masao Kosugi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pattern transfer apparatus
- Patent number 4,648,708
- Issue date Mar 10, 1987
- Canon Kabushiki Kaisha
- Masao Kosugi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and device for discriminating stillness of a step exposure a...
- Patent number 4,627,010
- Issue date Dec 2, 1986
- Canon Kabushiki Kaisha
- Masao Kosugi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus with detecting means insertable into an exposure...
- Patent number 4,617,469
- Issue date Oct 14, 1986
- Canon Kabushiki Kaisha
- Kazuo Takahashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Step type mask aligner
- Patent number 4,530,587
- Issue date Jul 23, 1985
- Canon Kabushiki Kaisha
- Masao Kosugi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 4,521,082
- Issue date Jun 4, 1985
- Canon Kabushiki Kaisha
- Akiyoshi Suzuki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Transfer apparatus provided with an auto-focusing mechanism
- Patent number 4,506,977
- Issue date Mar 26, 1985
- Canon Kabushiki Kaisha
- Hiroshi Sato
- G02 - OPTICS
Information Patent Grant
Shot arranging method in a divisional printing apparatus
- Patent number 4,488,806
- Issue date Dec 18, 1984
- Canon Kabushiki Kaisha
- Kazuo Takahashi
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS

Masao Kosugi

Person

Patents Grantslast 30 patents

Projection and exposure apparatus including an optical member and a...

Projection exposure apparatus and microdevice manufacturing method...

Alignment and exposure apparatus

Alignment and exposure apparatus and method for manufacture of inte...

Exposure method and apparatus

Alignment and exposure apparatus

Projection exposure apparatus

Exposure system including a device for analyzing an affect of a waf...

Precision actuator

Alignment and exposure apparatus and method for manufacture of inte...

Alignment and exposure apparatus and method for manufacture of inte...

Step-and-repeat alignment and exposure method and apparatus

Observation system for a projection exposure apparatus

Step-and-repeat alignment and exposure method and apparatus

Step and repeat exposure apparatus having improved system for aligning

Projection exposure apparatus

Projection exposure apparatus

Container for a sheet-like article

Method and apparatus for processing a plate-like workpiece

Mask storing mechanism

Semiconductor circuit manufacturing apparatus having selectively op...

Projection exposure apparatus having an alignment light of a wavele...

Device for adjusting projection magnification

Pattern transfer apparatus

Method and device for discriminating stillness of a step exposure a...

Exposure apparatus with detecting means insertable into an exposure...

Step type mask aligner

Exposure apparatus

Transfer apparatus provided with an auto-focusing mechanism

Shot arranging method in a divisional printing apparatus