Masao Kubodera

Person

  • Yamanashi, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Multi-chamber system provided with carrier units

    • Patent number 5,474,410
    • Issue date Dec 12, 1995
    • Tel-Varian Limited
    • Masahito Ozawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Semiconductor processing apparatus

    • Patent number 5,445,675
    • Issue date Aug 29, 1995
    • Tel-Varian Limited
    • Masao Kubodera
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Surface processing apparatus

    • Patent number 5,332,442
    • Issue date Jul 26, 1994
    • Tokyo Electron Kabushiki Kaisha
    • Masao Kubodera
    • C30 - CRYSTAL GROWTH