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Masao Otaki
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Minamisaitama-gun, JP
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Patents Grants
last 30 patents
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Patent Grant
Levenson type phase shift mask and manufacturing method thereof
Patent number
7,632,613
Issue date
Dec 15, 2009
Toppan Printing Co., Ltd.
Yosuke Kojima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Levenson type phase shift mask and manufacturing method thereof
Publication number
20070037072
Publication date
Feb 15, 2007
Toppan Printing Co., Ltd.
Yosuke Kojima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY