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Masao Yoshioka
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Nirasaki-Shi, JP
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last 30 patents
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Patent Grant
Processing apparatus and processing method
Patent number
8,398,813
Issue date
Mar 19, 2013
Tokyo Electron Limited
Yasuo Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Processing apparatus and processing method
Publication number
20080113104
Publication date
May 15, 2008
TOKYO ELECTRON LIMITED
Yasuo Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Processing apparatus and processing method
Publication number
20080067147
Publication date
Mar 20, 2008
TOKYO ELECTRON LIMITED
Yasuo Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Processing apparatus and processing method
Publication number
20050150455
Publication date
Jul 14, 2005
TOKYO ELECTRON LIMITED
Yasuo Kobayashi
H01 - BASIC ELECTRIC ELEMENTS