Masaru Aomori

Follow

Person

Nirasaki, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for detecting an end point of a cleaning process
- Patent number 6,737,666
- Issue date May 18, 2004
- NEC Electronics Corporation
- Natsuko Ito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor-phase processing method capable of eliminating particle forma...
- Patent number 6,346,425
- Issue date Feb 12, 2002
- Tokyo Electron Limited
- Natsuko Ito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...