Masaru ISAGO

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus
- Patent number 11,367,595
- Issue date Jun 21, 2022
- Tokyo Electron Limited
- Masaru Isago
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of cleaning plasma processing apparatus
- Patent number 10,553,409
- Issue date Feb 4, 2020
- Tokyo Electron Limited
- Hiraku Murakami
- B08 - CLEANING
Information Patent Grant
Etching method and etching apparatus
- Patent number 9,728,418
- Issue date Aug 8, 2017
- Tokyo Electron Limited
- Keigo Toyoda
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240112891
- Publication date Apr 4, 2024
- TOKYO ELECTRON LIMITED
- Masaru ISAGO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT MEDIUM CIRCULATION SYSTEM AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210074519
- Publication date Mar 11, 2021
- TOKYO ELECTRON LIMITED
- Masaru ISAGO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING APPARATUS AND METHOD FOR CONTROLLING PROCESSING APPARATUS
- Publication number 20190318914
- Publication date Oct 17, 2019
- TOKYO ELECTRON LIMITED
- Naohiko OKUNISHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20180374722
- Publication date Dec 27, 2018
- TOKYO ELECTRON LIMITED
- Masaru Isago
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF CLEANING PLASMA PROCESSING APPARATUS
- Publication number 20180330930
- Publication date Nov 15, 2018
- TOKYO ELECTRON LIMITED
- Hiraku MURAKAMI
- B08 - CLEANING
Information Patent Application
ETCHING METHOD AND ETCHING APPARATUS
- Publication number 20160079074
- Publication date Mar 17, 2016
- TOKYO ELECTRON LIMITED
- Keigo TOYODA
- H01 - BASIC ELECTRIC ELEMENTS