Masaru Kubota

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Miyagi-ken, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method of sputtering a silicon nitride film
- Patent number 5,550,091
- Issue date Aug 27, 1996
- Frontec Incorporated
- Koichi Fukuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...