Masaru Nishino

Person

Miyagi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Pattern enhancement using a gas cluster ion beam
- Patent number 11,450,506
- Issue date Sep 20, 2022
- TEL MANUFACTURING AND ENGINEERING OF AMERICA, INC.
- Kazuya Dobashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing method and plasma processing apparatus
- Patent number 9,653,317
- Issue date May 16, 2017
- Tokyo Electron Limited
- Masaru Nishino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for purging a substrate container
- Patent number 9,305,817
- Issue date Apr 5, 2016
- Tokyo Electron Limited
- Seiichi Kaise
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and method
- Patent number 8,896,210
- Issue date Nov 25, 2014
- Tokyo Electron Limited
- Masaru Nishino
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 8,790,489
- Issue date Jul 29, 2014
- Tokyo Electron Limited
- Masanobu Honda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical communication device, optical communication system, optical...
- Patent number 8,190,023
- Issue date May 29, 2012
- NEC Corporation
- Masaru Nishino
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Low damage method for ashing a substrate using CO2/CO-based process
- Patent number 7,637,269
- Issue date Dec 29, 2009
- Tokyo Electron Limited
- Kelvin Zin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dry developing method
- Patent number 6,986,851
- Issue date Jan 17, 2006
- Tokyo Electron Limited
- Akinori Kitamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Level-flattening circuit for WDM optical signals
- Patent number 6,594,046
- Issue date Jul 15, 2003
- NEC Corporation
- Masaru Nishino
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Cross-connection of wavelength-division-multiplexed high speed opti...
- Patent number 5,963,685
- Issue date Oct 5, 1999
- NEC Corporation
- Masaru Nishino
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
Pattern Enhancement Using a Gas Cluster Ion Beam
- Publication number 20210335568
- Publication date Oct 28, 2021
- TOKYO ELECTRON LIMITED
- Kazuya Dobashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING METHOD
- Publication number 20170221684
- Publication date Aug 3, 2017
- TOKYO ELECTRON LIMITED
- Masaru NISHINO
- B08 - CLEANING
Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20150118859
- Publication date Apr 30, 2015
- TOKYO ELECTRON LIMITED
- Masaru NISHINO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PURGING A SUBSTRATE CONTAINER
- Publication number 20130213442
- Publication date Aug 22, 2013
- TOKYO ELECTRON LIMITED
- Seiichi KAISE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND METHOD
- Publication number 20130162142
- Publication date Jun 27, 2013
- TOCALO CO., LTD.
- Masaru NISHINO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20120000886
- Publication date Jan 5, 2012
- TOKYO ELECTRON LIMITED
- Masanobu HONDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL COMMUNICATION DEVICE, OPTICAL COMMUNICATION SYSTEM, OPTICAL...
- Publication number 20100028004
- Publication date Feb 4, 2010
- Masaru NISHINO
- H04 - ELECTRIC COMMUNICATION TECHNIQUE

Masaru Nishino

Person

Patents Grantslast 30 patents

Pattern enhancement using a gas cluster ion beam

Plasma processing method and plasma processing apparatus

Method for purging a substrate container

Plasma processing apparatus and method

Substrate processing apparatus and substrate processing method

Optical communication device, optical communication system, optical...

Low damage method for ashing a substrate using CO2/CO-based process

Dry developing method

Level-flattening circuit for WDM optical signals

Cross-connection of wavelength-division-multiplexed high speed opti...

Patents Applicationslast 30 patents

Pattern Enhancement Using a Gas Cluster Ion Beam

PLASMA PROCESSING METHOD

PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS

METHOD FOR PURGING A SUBSTRATE CONTAINER

PLASMA PROCESSING APPARATUS AND METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

OPTICAL COMMUNICATION DEVICE, OPTICAL COMMUNICATION SYSTEM, OPTICAL...