Masaru Nyui

Person

Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 7,916,273
- Issue date Mar 29, 2011
- Canon Kabushiki Kaisha
- Masaru Nyui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 6,551,172
- Issue date Apr 22, 2003
- Canon Kabushiki Kaisha
- Masaru Nyui
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing method and polishing apparatus using the same
- Patent number 6,503,361
- Issue date Jan 7, 2003
- Canon Kabushiki Kaisha
- Masaru Nyui
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 6,142,855
- Issue date Nov 7, 2000
- Canon Kabushiki Kaisha
- Masaru Nyui
- B24 - GRINDING POLISHING
Information Patent Grant
Film thickness measuring method and apparatus
- Patent number 6,137,575
- Issue date Oct 24, 2000
- Canon Kabushiki Kaisha
- Yasushi Sugiyama
- G01 - MEASURING TESTING
Information Patent Grant
Polishing system
- Patent number 6,120,349
- Issue date Sep 19, 2000
- Canon Kabushiki Kaisha
- Masaru Nyui
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing method and polishing apparatus using the same
- Patent number 6,093,081
- Issue date Jul 25, 2000
- Canon Kabushiki Kaisha
- Masaru Nyui
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method and apparatus for measuring film thickness and film thicknes...
- Patent number 6,004,187
- Issue date Dec 21, 1999
- Canon Kabushiki Kaisha
- Masaru Nyui
- B24 - GRINDING POLISHING
Information Patent Grant
Rotation information detecting apparatus and method
- Patent number 5,640,377
- Issue date Jun 17, 1997
- Canon Kabushiki Kaisha
- Hiroshi Watanabe
- G11 - INFORMATION STORAGE
Information Patent Grant
Rotation measuring apparatus and displacement measuring apparatus
- Patent number 5,559,602
- Issue date Sep 24, 1996
- Canon Kabushiki Kaisha
- Masaru Nyui
- G01 - MEASURING TESTING
Information Patent Grant
Encoder with an optical scale and interference of zero and first or...
- Patent number 5,481,106
- Issue date Jan 2, 1996
- Canon Kabushiki Kaisha
- Masaru Nyui
- G01 - MEASURING TESTING
Information Patent Grant
Rotation detector using dual position interference light
- Patent number 5,369,271
- Issue date Nov 29, 1994
- Canon Kabushiki Kaisha
- Masaru Nyui
- G01 - MEASURING TESTING
Information Patent Grant
Talbot's interference type optical encoder
- Patent number 5,359,193
- Issue date Oct 25, 1994
- Canon Kabushiki Kaisha
- Masaru Nyui
- G01 - MEASURING TESTING
Information Patent Grant
Encoder using a birefringent element and a system including the same
- Patent number 5,302,821
- Issue date Apr 12, 1994
- Canon Kabushiki Kaisha
- Masahiko Igaki
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20070109514
- Publication date May 17, 2007
- Masaru Nyui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Masaru Nyui

Person

Patents Grantslast 30 patents

Exposure apparatus and device manufacturing method

Polishing apparatus and polishing method

Polishing method and polishing apparatus using the same

Polishing apparatus and polishing method

Film thickness measuring method and apparatus

Polishing system

Polishing method and polishing apparatus using the same

Method and apparatus for measuring film thickness and film thicknes...

Rotation information detecting apparatus and method

Rotation measuring apparatus and displacement measuring apparatus

Encoder with an optical scale and interference of zero and first or...

Rotation detector using dual position interference light

Talbot's interference type optical encoder

Encoder using a birefringent element and a system including the same

Patents Applicationslast 30 patents

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD