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Masaru SASAKI
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Ishikawa, JP
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last 30 patents
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Patent Grant
Silicon carbide member for plasma processing apparatus, and product...
Patent number
11,264,214
Issue date
Mar 1, 2022
HOKURIKU SEIKEI INDUSTRIAL CO., LTD.
Tomohisa Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
ELECTROSTATIC CHUCK
Publication number
20210225619
Publication date
Jul 22, 2021
HOKURIKU SEIKEI INDUSTRIAL CO., LTD.
Tomohisa SUZUKI
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SILICON CARBIDE MEMBER FOR PLASMA PROCESSING APPARATUS, AND PRODUCT...
Publication number
20190304755
Publication date
Oct 3, 2019
HOKURIKU SEIKEI INDUSTRIAL CO., LTD.
Tomohisa SUZUKI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...