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Masaru SUGIMOTO
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Hillsboro, OR, US
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last 30 patents
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Patent Grant
Fabrication process flow of dielectric layer for isolation of nano-...
Patent number
11,605,712
Issue date
Mar 14, 2023
Tokyo Electron Limited
Shimpei Yamaguchi
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
FABRICATION PROCESS FLOW OF DIELECTRIC LAYER FOR ISOLATION OF NANO-...
Publication number
20210375684
Publication date
Dec 2, 2021
TOKYO ELECTRON LIMITED
Shimpei YAMAGUCHI
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SUBSTRATE PROCESSING METHOD FOR FORMING INNER SPACERS IN A NANO-SHE...
Publication number
20210376123
Publication date
Dec 2, 2021
TOKYO ELECTRON LIMITED
Shimpei YAMAGUCHI
H01 - BASIC ELECTRIC ELEMENTS