Masaru SUZUKI

Person

Nirasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Probe apparatus and substrate transfer method
- Patent number 8,726,748
- Issue date May 20, 2014
- Tokyo Electron Limited
- Tadashi Obikane
- G01 - MEASURING TESTING
Information Patent Grant
Inspection apparatus having alignment mechanism
- Patent number 8,294,480
- Issue date Oct 23, 2012
- Tokyo Electron Limited
- Masaru Suzuki
- G01 - MEASURING TESTING
Information Patent Grant
Mounting device
- Patent number 8,113,084
- Issue date Feb 14, 2012
- Tokyo Electron Limited
- Kazuya Yano
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method for calculating height of chuck top and program storage medi...
- Patent number 8,027,528
- Issue date Sep 27, 2011
- Tokyo Electron Limited
- Kazunari Ishii
- G01 - MEASURING TESTING
Information Patent Grant
Mounting device
- Patent number 7,963,513
- Issue date Jun 21, 2011
- Tokyo Electron Limited
- Hiroshi Shimoyama
- G01 - MEASURING TESTING
Information Patent Grant
Probe apparatus and method for measuring electrical characteristics...
- Patent number 7,940,065
- Issue date May 10, 2011
- Tokyo Electron Limited
- Kazuya Yano
- G01 - MEASURING TESTING
Information Patent Grant
Probe apparatus, probing method, and storage medium
- Patent number 7,859,283
- Issue date Dec 28, 2010
- Tokyo Electron Limited
- Yasuhito Yamamoto
- G01 - MEASURING TESTING
Information Patent Grant
Method for detecting tip position of probe, alignment method, appar...
- Patent number 7,839,156
- Issue date Nov 23, 2010
- Tokyo Electron Limited
- Hiroshi Yamada
- G01 - MEASURING TESTING
Information Patent Grant
Alignment method, tip position detecting device and probe apparatus
- Patent number 7,772,862
- Issue date Aug 10, 2010
- Tokyo Electron Limited
- Hiroshi Yamada
- G01 - MEASURING TESTING
Information Patent Grant
Probe apparatus and method for measuring electrical characteristics...
- Patent number 7,719,297
- Issue date May 18, 2010
- Tokyo Electron Limited
- Kazuhiro Takabe
- G01 - MEASURING TESTING
Information Patent Grant
Each inspection units of a probe apparatus is provided with an imag...
- Patent number 7,701,236
- Issue date Apr 20, 2010
- Tokyo Electron Limited
- Shuji Akiyama
- G01 - MEASURING TESTING
Information Patent Grant
Unloading method of object, program storage medium, and mounting me...
- Patent number 7,556,246
- Issue date Jul 7, 2009
- Tokyo Electron Limited
- Masaru Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transporting mechanism, movable probe card transporting apparatus u...
- Patent number 7,385,386
- Issue date Jun 10, 2008
- Tokyo Electron Limited
- Hiroshi Amemiya
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Transporting mechanism, movable probe card transporting apparatus u...
- Patent number 6,958,618
- Issue date Oct 25, 2005
- Tokyo Electron Limited
- Hiroshi Amemiya
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Probe card carrier and method of carrying probe card
- Patent number 6,838,892
- Issue date Jan 4, 2005
- Tokyo Electron Limited
- Masaru Suzuki
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Probe card transporting apparatus and to-be-connected body moving m...
- Patent number 6,822,464
- Issue date Nov 23, 2004
- Tokyo Electron Limited
- Masaru Suzuki
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for measuring properties of probe card and probing method
- Patent number 6,809,536
- Issue date Oct 26, 2004
- Tokyo Electron Limited
- Masaru Suzuki
- G01 - MEASURING TESTING
Information Patent Grant
Drivingly rotatable mechanism of specimen loading table and specime...
- Patent number 6,634,245
- Issue date Oct 21, 2003
- Tokyo Electron Limited
- Haruhiko Yoshioka
- G01 - MEASURING TESTING
Information Patent Grant
Transfer mechanism for use in exchange of probe card
- Patent number 6,414,478
- Issue date Jul 2, 2002
- Tokyo Electron Limited
- Masaru Suzuki
- G01 - MEASURING TESTING
Information Patent Grant
Probe apparatus with a swinging holder for an object of examination
- Patent number 5,404,111
- Issue date Apr 4, 1995
- Tokyo Electron Limited
- Shigeoki Mori
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
IMMERSION LITHOGRAPHY APPARATUS AND METHOD FOR CLEANING IMMERSION L...
- Publication number 20110170076
- Publication date Jul 14, 2011
- Masaru SUZUKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROBE APPARATUS AND SUBSTRATE TRANSFER METHOD
- Publication number 20110107858
- Publication date May 12, 2011
- TOKYO ELECTRON LIMITED
- Tadashi Obikane
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND EXPOSURE DEVICE
- Publication number 20110045613
- Publication date Feb 24, 2011
- Masaru SUZUKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ALIGNMENT METHOD, TIP POSITION DETECTING DEVICE AND PROBE APPARATUS
- Publication number 20090251163
- Publication date Oct 8, 2009
- TOKYO ELECTRON LIMITED
- Hiroshi Yamada
- G01 - MEASURING TESTING
Information Patent Application
PROBE APPARATUS, PROBING METHOD, AND STORAGE MEDIUM
- Publication number 20090212803
- Publication date Aug 27, 2009
- TOKYO ELECTRON LIMITED
- Yasuhito Yamamoto
- G01 - MEASURING TESTING
Information Patent Application
PROBE APPARATUS, PROBING METHOD AND STORAGE MEDIUM
- Publication number 20090195263
- Publication date Aug 6, 2009
- TOKYO ELECTRON LIMITED
- Kazuya Yano
- G01 - MEASURING TESTING
Information Patent Application
PROBE APPARATUS
- Publication number 20080290886
- Publication date Nov 27, 2008
- TOKYO ELECTRON LIMITED
- Shuji Akiyama
- G01 - MEASURING TESTING
Information Patent Application
PROBE APPARATUS, PROBING METHOD AND STORAGE MEDIUM
- Publication number 20080238463
- Publication date Oct 2, 2008
- TOKYO ELECTRON LIMITED
- Kazuhiro TAKABE
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION APPARATUS
- Publication number 20080231301
- Publication date Sep 25, 2008
- TOKYO ELECTRON LIMITED
- Masaru Suzuki
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR DETECTING TIP POSITION OF PROBE, ALIGNMENT METHOD, APPAR...
- Publication number 20080231300
- Publication date Sep 25, 2008
- TOKYO ELECTRON LIMTED
- Hiroshi Yamada
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR CALCULATING HEIGHT OF CHUCK TOP AND PROGRAM STORAGE MEDI...
- Publication number 20080198176
- Publication date Aug 21, 2008
- TOKYO ELECTRON LIMITED
- Kazunari ISHII
- G01 - MEASURING TESTING
Information Patent Application
MOUNTING DEVICE
- Publication number 20080184916
- Publication date Aug 7, 2008
- TOKYO ELECTRON LIMITED
- Kazuya YANO
- G12 - INSTRUMENT DETAILS
Information Patent Application
MOUNTING DEVICE
- Publication number 20080187420
- Publication date Aug 7, 2008
- TOKYO ELECTRON LIMITED
- Hiroshi SHIMOYAMA
- G01 - MEASURING TESTING
Information Patent Application
UNLOADING METHOD OF OBJECT, PROGRAM STORAGE MEDIUM, AND MOUNTING ME...
- Publication number 20070118246
- Publication date May 24, 2007
- TOKYO ELECTRON LIMITED
- Masaru SUZUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Transporting mechanism, movable probe card transporting apparatus u...
- Publication number 20050280431
- Publication date Dec 22, 2005
- TOKYO ELECTRON LIMITED
- Hiroshi Amemiya
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Transporting mechanism, movable probe card transporting apparatus u...
- Publication number 20040183525
- Publication date Sep 23, 2004
- Hiroshi Amemiya
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Probe card transporting apparatus and to-be-connected body moving m...
- Publication number 20040164756
- Publication date Aug 26, 2004
- Masaru Suzuki
- G01 - MEASURING TESTING
Information Patent Application
Probe card carrier and method of carrying probe card
- Publication number 20030178987
- Publication date Sep 25, 2003
- Masaru Suzuki
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Apparatus for measuring properties of probe card and probing method
- Publication number 20030173951
- Publication date Sep 18, 2003
- Masaru Suzuki
- G01 - MEASURING TESTING

Masaru SUZUKI

Person

Patents Grantslast 30 patents

Probe apparatus and substrate transfer method

Inspection apparatus having alignment mechanism

Mounting device

Method for calculating height of chuck top and program storage medi...

Mounting device

Probe apparatus and method for measuring electrical characteristics...

Probe apparatus, probing method, and storage medium

Method for detecting tip position of probe, alignment method, appar...

Alignment method, tip position detecting device and probe apparatus

Probe apparatus and method for measuring electrical characteristics...

Each inspection units of a probe apparatus is provided with an imag...

Unloading method of object, program storage medium, and mounting me...

Transporting mechanism, movable probe card transporting apparatus u...

Transporting mechanism, movable probe card transporting apparatus u...

Probe card carrier and method of carrying probe card

Probe card transporting apparatus and to-be-connected body moving m...

Apparatus for measuring properties of probe card and probing method

Drivingly rotatable mechanism of specimen loading table and specime...

Transfer mechanism for use in exchange of probe card

Probe apparatus with a swinging holder for an object of examination

Patents Applicationslast 30 patents

IMMERSION LITHOGRAPHY APPARATUS AND METHOD FOR CLEANING IMMERSION L...

PROBE APPARATUS AND SUBSTRATE TRANSFER METHOD

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND EXPOSURE DEVICE

ALIGNMENT METHOD, TIP POSITION DETECTING DEVICE AND PROBE APPARATUS

PROBE APPARATUS, PROBING METHOD, AND STORAGE MEDIUM

PROBE APPARATUS, PROBING METHOD AND STORAGE MEDIUM

PROBE APPARATUS

PROBE APPARATUS, PROBING METHOD AND STORAGE MEDIUM

INSPECTION APPARATUS

METHOD FOR DETECTING TIP POSITION OF PROBE, ALIGNMENT METHOD, APPAR...

METHOD FOR CALCULATING HEIGHT OF CHUCK TOP AND PROGRAM STORAGE MEDI...

MOUNTING DEVICE

MOUNTING DEVICE

UNLOADING METHOD OF OBJECT, PROGRAM STORAGE MEDIUM, AND MOUNTING ME...

Transporting mechanism, movable probe card transporting apparatus u...

Transporting mechanism, movable probe card transporting apparatus u...

Probe card transporting apparatus and to-be-connected body moving m...

Probe card carrier and method of carrying probe card

Apparatus for measuring properties of probe card and probing method