Masaru Tomono

Person

Kumamoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Light irradiating device, light irradiating method and recording me...
- Patent number 11,256,172
- Issue date Feb 22, 2022
- Tokyo Electron Limited
- Takaya Kikai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical processing apparatus and substrate processing apparatus
- Patent number 10,747,121
- Issue date Aug 18, 2020
- Tokyo Electron Limited
- Teruhiko Moriya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure apparatus, exposure apparatus adjustment method and storag...
- Patent number 10,558,125
- Issue date Feb 11, 2020
- Tokyo Electron Limited
- Teruhiko Moriya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical processing apparatus, coating/development apparatus, optica...
- Patent number 10,527,948
- Issue date Jan 7, 2020
- Tokyo Electron Limited
- Seiji Nagahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure apparatus, exposure method and storage medium
- Patent number 10,274,843
- Issue date Apr 30, 2019
- Tokyo Electron Limited
- Seiji Nagahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure apparatus, resist pattern forming method, and storage medium
- Patent number 10,101,669
- Issue date Oct 16, 2018
- Tokyo Electron Limited
- Seiji Nagahara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate treatment system
- Patent number 10,025,190
- Issue date Jul 17, 2018
- Tokyo Electron Limited
- Seiji Nagahara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Light irradiation apparatus
- Patent number 9,899,243
- Issue date Feb 20, 2018
- Tokyo Electron Limited
- Masahide Tadokoro
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
EDGE EXPOSURE APPARATUS AND EDGE EXPOSURE METHOD
- Publication number 20250021027
- Publication date Jan 16, 2025
- TOKYO ELECTRON LIMITED
- Keisaku KAI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LIGHT IRRADIATING DEVICE, LIGHT IRRADIATING METHOD AND RECORDING ME...
- Publication number 20200409269
- Publication date Dec 31, 2020
- TOKYO ELECTRON LIMITED
- Takaya Kikai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL PROCESSING APPARATUS, COATING/DEVELOPMENT APPARATUS, OPTICA...
- Publication number 20180173103
- Publication date Jun 21, 2018
- TOKYO ELECTRON LIMITED
- Seiji NAGAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20180164696
- Publication date Jun 14, 2018
- TOKYO ELECTRON LIMITED
- Teruhiko MORIYA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TRANSFER METHOD, AND COMPUTER...
- Publication number 20180164700
- Publication date Jun 14, 2018
- TOKYO ELECTRON LIMITED
- Takuya MORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD AND STORAGE MEDIUM
- Publication number 20180143540
- Publication date May 24, 2018
- TOKYO ELECTRON LIMITED
- Seiji NAGAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE APPARATUS ADJUSTMENT METHOD AND STORAG...
- Publication number 20180136567
- Publication date May 17, 2018
- TOKYO ELECTRON LIMITED
- Teruhiko MORIYA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE TREATMENT SYSTEM
- Publication number 20170031245
- Publication date Feb 2, 2017
- TOKYO ELECTRON LIMITED
- Seiji NAGAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXPOSURE APPARATUS, RESIST PATTERN FORMING METHOD, AND STORAGE MEDIUM
- Publication number 20160327869
- Publication date Nov 10, 2016
- TOKYO ELECTRON LIMITED
- Seiji NAGAHARA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TRANSFER METHOD, AND COMPUTER...
- Publication number 20160320713
- Publication date Nov 3, 2016
- TOKYO ELECTRON LIMITED
- Takuya MORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIGHT IRRADIATION APPARATUS
- Publication number 20160170316
- Publication date Jun 16, 2016
- TOKYO ELECTRON LIMITED
- Masahide Tadokoro
- H01 - BASIC ELECTRIC ELEMENTS

Masaru Tomono

Person

Patents Grantslast 30 patents

Light irradiating device, light irradiating method and recording me...

Optical processing apparatus and substrate processing apparatus

Exposure apparatus, exposure apparatus adjustment method and storag...

Optical processing apparatus, coating/development apparatus, optica...

Exposure apparatus, exposure method and storage medium

Exposure apparatus, resist pattern forming method, and storage medium

Substrate treatment system

Light irradiation apparatus

Patents Applicationslast 30 patents

EDGE EXPOSURE APPARATUS AND EDGE EXPOSURE METHOD

LIGHT IRRADIATING DEVICE, LIGHT IRRADIATING METHOD AND RECORDING ME...

OPTICAL PROCESSING APPARATUS, COATING/DEVELOPMENT APPARATUS, OPTICA...

OPTICAL PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TRANSFER METHOD, AND COMPUTER...

EXPOSURE APPARATUS, EXPOSURE METHOD AND STORAGE MEDIUM

EXPOSURE APPARATUS, EXPOSURE APPARATUS ADJUSTMENT METHOD AND STORAG...

SUBSTRATE TREATMENT SYSTEM

EXPOSURE APPARATUS, RESIST PATTERN FORMING METHOD, AND STORAGE MEDIUM

SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TRANSFER METHOD, AND COMPUTER...

LIGHT IRRADIATION APPARATUS