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Masashi Arasawa

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Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma processing apparatus and method
    • Patent number RE36810
    • Issue date Aug 8, 2000
    • Tokyo Electron Limited
    • Masashi Arasawa
    • 156 - Adhesive bonding and miscellaneous chemical manufacture
  • Information Patent Grant

    Anisotropic etching method and apparatus
    • Patent number 5,766,498
    • Issue date Jun 16, 1998
    • Hitachi, Ltd.
    • Masayuki Kojima
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma processing apparatus and method
    • Patent number 5,622,593
    • Issue date Apr 22, 1997
    • Tokyo Electron Limited
    • Masashi Arasawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma processing apparatus and method
    • Patent number 5,547,539
    • Issue date Aug 20, 1996
    • Tokyo Electron Limited
    • Masashi Arasawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Anisotropic etching method and apparatus
    • Patent number 5,445,709
    • Issue date Aug 29, 1995
    • Hitachi, Ltd.
    • Masayuki Kojima
    • H01 - BASIC ELECTRIC ELEMENTS