Masashi Enomoto

Person

Koshi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate treatment method and substrate treatment system
- Patent number 12,197,129
- Issue date Jan 14, 2025
- Tokyo Electron Limited
- Satoru Shimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate inspection device, substrate inspection method, and stora...
- Patent number 12,148,147
- Issue date Nov 19, 2024
- Tokyo Electron Limited
- Masashi Enomoto
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Thermal imaging sensor for integration into track system
- Patent number 12,123,778
- Issue date Oct 22, 2024
- Tokyo Electron Limited
- Michael Carcasi
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Method for forming mask pattern, storage medium, and apparatus for...
- Patent number 12,002,676
- Issue date Jun 4, 2024
- Tokyo Electron Limited
- Takashi Yamauchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment method and substrate treatment system
- Patent number 11,876,022
- Issue date Jan 16, 2024
- Tokyo Electron Limited
- Masashi Enomoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and processing condition adjustment...
- Patent number 11,809,091
- Issue date Nov 7, 2023
- Tokyo Electron Limited
- Masahide Tadokoro
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Systems and methods for spin process video analysis during substrat...
- Patent number 11,637,031
- Issue date Apr 25, 2023
- Tokyo Electron Limited
- Michael Carcasi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate processing method, substrate processing apparatus, and co...
- Patent number 11,604,415
- Issue date Mar 14, 2023
- Tokyo Electron Limited
- Takashi Yamauchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,594,424
- Issue date Feb 28, 2023
- Tokyo Electron Limited
- Takahiro Shiozawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming mask pattern, storage medium, and apparatus for...
- Patent number 11,508,580
- Issue date Nov 22, 2022
- Tokyo Electron Limited
- Takashi Yamauchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing capable of suppressing a decrease in throughpu...
- Patent number 11,287,798
- Issue date Mar 29, 2022
- Tokyo Electron Limited
- Teruhiko Kodama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method and rec...
- Patent number 11,036,140
- Issue date Jun 15, 2021
- Tokyo Electron Limited
- Shinichiro Kawakami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Film forming system, film forming method, and computer storage medium
- Patent number 10,964,606
- Issue date Mar 30, 2021
- Tokyo Electron Limited
- Satoru Shimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment method and thermal treatment apparatus
- Patent number 10,656,526
- Issue date May 19, 2020
- Tokyo Electron Limited
- Yohei Sano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method and sto...
- Patent number 10,649,335
- Issue date May 12, 2020
- Tokyo Electron Limited
- Teruhiko Kodama
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing apparatus, substrate processing method and mem...
- Patent number 10,528,028
- Issue date Jan 7, 2020
- Tokyo Electron Limited
- Teruhiko Kodama
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate processing method, substrate processing system and substr...
- Patent number 10,520,831
- Issue date Dec 31, 2019
- Tokyo Electron Limited
- Masashi Enomoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Polishing cleaning mechanism, substrate processing apparatus, and s...
- Patent number 10,328,546
- Issue date Jun 25, 2019
- Tokyo Electron Limited
- Akihiro Kubo
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing cleaning mechanism, substrate processing apparatus, and s...
- Patent number 9,669,510
- Issue date Jun 6, 2017
- Tokyo Electron Limited
- Akihiro Kubo
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing apparatus, substrate processing method and mem...
- Patent number 9,601,394
- Issue date Mar 21, 2017
- Tokyo Electron Limited
- Teruhiko Kodama
- G05 - CONTROLLING REGULATING
Information Patent Grant
Cleaning apparatus and method for immersion light exposure
- Patent number 8,010,221
- Issue date Aug 30, 2011
- Tokyo Electron Limited
- Kouichi Hontake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating/developing apparatus and pattern forming method
- Patent number 7,924,396
- Issue date Apr 12, 2011
- Tokyo Electron Limited
- Hisashi Kawano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR FORMING MASK PATTERN, STORAGE MEDIUM, AND APPARATUS FOR...
- Publication number 20240274438
- Publication date Aug 15, 2024
- TOKYO ELECTRON LIMITED
- Takashi YAMAUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING CONTROL DEVICE, ETCHING CONTROL METHOD, AND ETCHING CONTROL...
- Publication number 20240096658
- Publication date Mar 21, 2024
- TOKYO ELECTRON LIMITED
- Toyohisa Tsuruda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ETCHING CONTROL SYSTEM AND ETCHING CONTROL METHOD
- Publication number 20240096657
- Publication date Mar 21, 2024
- TOKYO ELECTRON LIMITED
- Toyohisa Tsuruda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING CONTROL SYSTEM AND ETCHING CONTROL METHOD
- Publication number 20240096656
- Publication date Mar 21, 2024
- TOKYO ELECTRON LIMITED
- Toyohisa Tsuruda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PERIPHERAL EDGE PROCESSING APPARATUS, PERIPHERAL EDGE PROCESSING ME...
- Publication number 20230314960
- Publication date Oct 5, 2023
- TOKYO ELECTRON LIMITED
- Masashi ENOMOTO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE ANALYSIS SYSTEM, SUBSTRATE ANALYSIS METHOD, AND RECORDING...
- Publication number 20230214984
- Publication date Jul 6, 2023
- TOKYO ELECTRON LIMITED
- Masashi Enomoto
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
- Publication number 20230085325
- Publication date Mar 16, 2023
- TOKYO ELECTRON LIMITED
- Hirokazu KYOKANE
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR FORMING MASK PATTERN, STORAGE MEDIUM, AND APPARATUS FOR...
- Publication number 20230042982
- Publication date Feb 9, 2023
- TOKYO ELECTRON LIMITED
- Takashi YAMAUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE INSPECTION DEVICE, SUBSTRATE INSPECTION METHOD, AND STORA...
- Publication number 20220398708
- Publication date Dec 15, 2022
- TOKYO ELECTRON LIMITED
- Masashi ENOMOTO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SENSOR TECHNOLOGY INTEGRATION INTO COATING TRACK
- Publication number 20220269177
- Publication date Aug 25, 2022
- TOKYO ELECTRON LIMITED
- Michael Carcasi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND PROCESSING CONDITION ADJUSTMENT...
- Publication number 20220252992
- Publication date Aug 11, 2022
- Tokyo Electron Limited
- Masahide TADOKORO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, ESTIMATION METHOD OF SUBSTRATE PROC...
- Publication number 20210387224
- Publication date Dec 16, 2021
- TOKYO ELECTRON LIMITED
- Hiroshi Nakamura
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT SYSTEM
- Publication number 20210318618
- Publication date Oct 14, 2021
- Tokyo Electron Limited
- Satoru SHIMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Thermal Imaging Sensor for Integration into Track System
- Publication number 20210285822
- Publication date Sep 16, 2021
- TOKYO ELECTRON LIMITED
- Michael Carcasi
- G01 - MEASURING TESTING
Information Patent Application
INFORMATION PROCESSING APPARATUS, INFORMATION PROCESSING METHOD AND...
- Publication number 20210262781
- Publication date Aug 26, 2021
- TOKYO ELECTRON LIMITED
- Masahide Tadokoro
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210249277
- Publication date Aug 12, 2021
- TOKYO ELECTRON LIMITED
- Takahiro SHIOZAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND CO...
- Publication number 20210208504
- Publication date Jul 8, 2021
- TOKYO ELECTRON LIMITED
- Takashi YAMAUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT SYSTEM
- Publication number 20210183712
- Publication date Jun 17, 2021
- TOKYO ELECTRON LIMITED
- Masashi ENOMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems and Methods for Spin Process Video Analysis During Substrat...
- Publication number 20210129166
- Publication date May 6, 2021
- TOKYO ELECTRON LIMITED
- Michael Carcasi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems and Methods for Spin Process Video Analysis During Substrat...
- Publication number 20210134637
- Publication date May 6, 2021
- TOKYO ELECTRON LIMITED
- Michael Carcasi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
METHODF FOR FORMING MASK PATTERN, STORAGE MEDIUM, AND APPARATUS FOR...
- Publication number 20200279736
- Publication date Sep 3, 2020
- Takashi YAMAUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...
- Publication number 20200233308
- Publication date Jul 23, 2020
- TOKYO ELECTRON LIMITED
- Shinichiro Kawakami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND MEM...
- Publication number 20200096966
- Publication date Mar 26, 2020
- TOKYO ELECTRON LIMITED
- Teruhiko KODAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING SYSTEM, FILM FORMING METHOD, AND COMPUTER STORAGE MEDIUM
- Publication number 20190355573
- Publication date Nov 21, 2019
- TOKYO ELECTRON LIMITED
- Satoru SHIMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...
- Publication number 20180253007
- Publication date Sep 6, 2018
- TOKYO ELECTRON LIMITED
- Teruhiko KODAMA
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE TREATMENT METHOD AND THERMAL TREATMENT APPARATUS
- Publication number 20180164689
- Publication date Jun 14, 2018
- TOKYO ELECTRON LIMITED
- Yohei SANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING SYSTEM AND SUBSTR...
- Publication number 20180076066
- Publication date Mar 15, 2018
- TOKYO ELECTRON LIMITED
- Masashi ENOMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLISHING CLEANING MECHANISM, SUBSTRATE PROCESSING APPARATUS, AND S...
- Publication number 20170225289
- Publication date Aug 10, 2017
- TOKYO ELECTRON LIMITED
- Akihiro KUBO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND MEM...
- Publication number 20170139399
- Publication date May 18, 2017
- TOKYO ELECTRON LIMITED
- Teruhiko KODAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND MEM...
- Publication number 20150255355
- Publication date Sep 10, 2015
- TOKYO ELECTRON LIMITED
- Teruhiko KODAMA
- H01 - BASIC ELECTRIC ELEMENTS

Masashi Enomoto

Person

Patents Grantslast 30 patents

Substrate treatment method and substrate treatment system

Substrate inspection device, substrate inspection method, and stora...

Thermal imaging sensor for integration into track system

Method for forming mask pattern, storage medium, and apparatus for...

Substrate treatment method and substrate treatment system

Substrate processing apparatus and processing condition adjustment...

Systems and methods for spin process video analysis during substrat...

Substrate processing method, substrate processing apparatus, and co...

Substrate processing method and substrate processing apparatus

Method for forming mask pattern, storage medium, and apparatus for...

Substrate processing capable of suppressing a decrease in throughpu...

Substrate processing apparatus, substrate processing method and rec...

Film forming system, film forming method, and computer storage medium

Substrate treatment method and thermal treatment apparatus

Substrate processing apparatus, substrate processing method and sto...

Substrate processing apparatus, substrate processing method and mem...

Substrate processing method, substrate processing system and substr...

Polishing cleaning mechanism, substrate processing apparatus, and s...

Polishing cleaning mechanism, substrate processing apparatus, and s...

Substrate processing apparatus, substrate processing method and mem...

Cleaning apparatus and method for immersion light exposure

Coating/developing apparatus and pattern forming method

Patents Applicationslast 30 patents

METHOD FOR FORMING MASK PATTERN, STORAGE MEDIUM, AND APPARATUS FOR...

ETCHING CONTROL DEVICE, ETCHING CONTROL METHOD, AND ETCHING CONTROL...

ETCHING CONTROL SYSTEM AND ETCHING CONTROL METHOD

ETCHING CONTROL SYSTEM AND ETCHING CONTROL METHOD

PERIPHERAL EDGE PROCESSING APPARATUS, PERIPHERAL EDGE PROCESSING ME...

SUBSTRATE ANALYSIS SYSTEM, SUBSTRATE ANALYSIS METHOD, AND RECORDING...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...

METHOD FOR FORMING MASK PATTERN, STORAGE MEDIUM, AND APPARATUS FOR...

SUBSTRATE INSPECTION DEVICE, SUBSTRATE INSPECTION METHOD, AND STORA...

SENSOR TECHNOLOGY INTEGRATION INTO COATING TRACK

SUBSTRATE PROCESSING APPARATUS AND PROCESSING CONDITION ADJUSTMENT...

SUBSTRATE PROCESSING APPARATUS, ESTIMATION METHOD OF SUBSTRATE PROC...

SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT SYSTEM

Thermal Imaging Sensor for Integration into Track System

INFORMATION PROCESSING APPARATUS, INFORMATION PROCESSING METHOD AND...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND CO...

SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT SYSTEM

Systems and Methods for Spin Process Video Analysis During Substrat...

Systems and Methods for Spin Process Video Analysis During Substrat...

METHODF FOR FORMING MASK PATTERN, STORAGE MEDIUM, AND APPARATUS FOR...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND MEM...

FILM FORMING SYSTEM, FILM FORMING METHOD, AND COMPUTER STORAGE MEDIUM

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...

SUBSTRATE TREATMENT METHOD AND THERMAL TREATMENT APPARATUS

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING SYSTEM AND SUBSTR...

POLISHING CLEANING MECHANISM, SUBSTRATE PROCESSING APPARATUS, AND S...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND MEM...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND MEM...