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Masashi Ichikawa
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Fukushima, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Wafer flatness evaluation method, wafer flatness evaluation apparat...
Patent number
7,474,386
Issue date
Jan 6, 2009
Kabushiki Kaisha Toshiba
Tadahito Fujisawa
G01 - MEASURING TESTING
Information
Patent Grant
Wafer flatness evaluation method, wafer flatness evaluation apparat...
Patent number
7,365,830
Issue date
Apr 29, 2008
Kabushiki Kaisha Toshiba
Tadahito Fujisawa
G01 - MEASURING TESTING
Information
Patent Grant
Method for manufacturing SOI wafer
Patent number
7,276,427
Issue date
Oct 2, 2007
Shin-Etsu Handotai Co., Ltd.
Masashi Ichikawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer flatness evaluation method, wafer flatness evaluation apparat...
Patent number
7,230,680
Issue date
Jun 12, 2007
Kabushiki Kaisha Toshiba
Tadahito Fujisawa
G01 - MEASURING TESTING
Information
Patent Grant
Method for manufacturing semiconductor wafer, method for receiving...
Patent number
7,203,559
Issue date
Apr 10, 2007
Shin-Etsu Handotai Co., Ltd.
Tatsuo Ito
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
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Patent Application
Surface Grinding Method and Manufacturing Method for Semiconductor...
Publication number
20090203212
Publication date
Aug 13, 2009
SHIN-ETSU HANDOTAI CO LTD
Masashi Ichikawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Wafer flatness evaluation method, wafer flatness evaluation apparat...
Publication number
20070177126
Publication date
Aug 2, 2007
Kabushiki Kaisha Toshiba
Tadahito Fujisawa
G01 - MEASURING TESTING
Information
Patent Application
Wafer flatness evaluation method, wafer flatness evaluation apparat...
Publication number
20070177127
Publication date
Aug 2, 2007
Kabushiki Kaisha Toshiba
Tadahito Fujisawa
G01 - MEASURING TESTING
Information
Patent Application
Method for manufacturing soi wafer
Publication number
20060014330
Publication date
Jan 19, 2006
Masashi Ichikawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor wafer manufacturing method, semiconductor wafer mnauf...
Publication number
20050085017
Publication date
Apr 21, 2005
Tatsuo Ito
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Wafer flatness evaluation method, wafer flatness evaluation apparat...
Publication number
20040185662
Publication date
Sep 23, 2004
Tadahito Fujisawa
G01 - MEASURING TESTING