Masashi IKEGAMI

Follow

Person

Miyagi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate support assembly, plasma processing apparatus, and plasma...
- Patent number 11,688,587
- Issue date Jun 27, 2023
- Tokyo Electron Limited
- Masashi Ikegami
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE SUPPORT ASSEMBLY, PLASMA PROCESSING APPARATUS, AND PLASMA...
- Publication number 20230298865
- Publication date Sep 21, 2023
- TOKYO ELECTRON LIMITED
- Masashi IKEGAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EDGE RING AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220157573
- Publication date May 19, 2022
- TOKYO ELECTRON LIMITED
- Junichi Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EDGE RING AND PLASMA PROCESSING APPARATUS
- Publication number 20210391151
- Publication date Dec 16, 2021
- TOKYO ELECTRON LIMITED
- Masashi Ikegami
- B08 - CLEANING
Information Patent Application
EDGE RING AND PLASMA PROCESSING APPARATUS
- Publication number 20210305023
- Publication date Sep 30, 2021
- TOKYO ELECTRON LIMITED
- Masahiro OGASAWARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC ATTRACTION METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20210082671
- Publication date Mar 18, 2021
- TOKYO ELECTRON LIMITED
- Masashi IKEGAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT ASSEMBLY, PLASMA PROCESSING APPARATUS, AND PLASMA...
- Publication number 20200118787
- Publication date Apr 16, 2020
- TOKYO ELECTRON LIMITED
- Masashi IKEGAMI
- H01 - BASIC ELECTRIC ELEMENTS